1：Experimental Design and Method Selection:

The study involved the deposition of ZnO:Al and ITO layers on glass and SHJ solar cells using a pulsed DC magnetron sputtering system. The optical and electrical properties of these layers were characterized to compare their performance.

2：Sample Selection and Data Sources:

Samples included ZnO:Al and ITO layers deposited under varying oxygen concentrations, and SHJ solar cells with these layers as front contacts. Data were obtained from Hall measurements, four-point probe measurements, and optical spectrometry.

3：List of Experimental Equipment and Materials:

Equipment included a pulsed DC magnetron sputtering system, Hall measurement setup, four-point probe, and optical spectrometry equipment. Materials included low iron soda-lime glass, ZnO:Al and ITO targets, and n-type Cz-Si wafers.

4：Experimental Procedures and Operational Workflow:

The layers were deposited under controlled oxygen partial flows, characterized for their electrical and optical properties, and implemented in SHJ solar cells. The solar cells were then tested for performance under standard conditions.

5：Data Analysis Methods:

Data analysis involved comparing the sheet resistance, contact resistance, and optical absorption of the ZnO:Al and ITO layers, and evaluating the solar cell performance metrics such as power conversion efficiency, fill factor, and short-circuit current density.