研究目的
To demonstrate a 3D configuration photodetector array using a-Ga2O3 films on polyethylene terephthalate (PET) substrate for the first time, and the 3D photodetector array was realized via a simple origami method.
研究成果
The 3D solar-blind photodetector array based on Ga2O3 films has been successfully demonstrated via origami method for the first time. The photodetector exhibits a relatively high spectral selectivity for solar-blind ultraviolet light detection. The device maintains a superior bending endurance and flexibility, and all the cells of the 3D photodetector array have highly consistent performance. This work offers a paradigm for fabricating 3D photodetectors from conventional semiconductor films.
研究不足
The development of 3D photodetectors is hampered by the low glass transition temperature of the flexible substrates, which limits the number of alternative materials for 3D photodetectors.
1:Experimental Design and Method Selection:
The study employs an origami method to fabricate a 3D solar-blind photodetector array from amorphous Ga2O3 films grown on PET substrates.
2:Sample Selection and Data Sources:
Ga2O3 films were deposited on PET substrates by radio frequency (RF) magnetron sputtering.
3:List of Experimental Equipment and Materials:
PET substrates, Ga2O3 ceramic target, RF magnetron sputtering system, thermal evaporation chamber, Au films, lithography and wet etching equipment.
4:Experimental Procedures and Operational Workflow:
The 2D Ga2O3 photodetector array prepared on PET is cut into a snowflake shape with eight petals, and then bent into a 3D hemispherical shape.
5:Data Analysis Methods:
The structural properties of the Ga2O3 films were evaluated by XRD, AFM, SEM, and EDS. The electrical characteristics were measured using a semiconductor parameter analyzer.
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X-ray diffractometer
SmartLab
Rigaku
Used to evaluate the structural properties of the Ga2O3 films.
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Spectrophotometer
UH4150
Hitachi
Used to record the absorption spectra of the Ga2O3 films.
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Semiconductor parameter analyzer
4200-SCS
Keithley
Used to measure the electrical characteristics of the photodetectors.
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Oscilloscope
DPO 2024B
Tektronix
Used to record the transient photoresponse under the excitation of a 266 nm pulse laser.
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PET substrates
Used as flexible substrates for the growth of Ga2O3 films.
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Ga2O3 ceramic target
Used in RF magnetron sputtering for the deposition of Ga2O3 films.
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RF magnetron sputtering system
Used for the deposition of Ga2O3 films on PET substrates.
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Thermal evaporation chamber
Used for the deposition of Au films onto the Ga2O3 films.
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Atomic force microscope
SmartSPM
AIST-NT
Used to characterize the surface morphology of the Ga2O3 films.
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Field-emission SEM
JSM-6700F
Used to characterize the surface morphology of the Ga2O3 films.
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