摘要： Ultrafast lasers are a versatile tool for micro processing for a wide range of materials. One common field of application is e.g. the surface structuring for mold and embossing tools. While the extremely short pulse durations < 10 ps and interaction times enable highly precise processing quality, the productivity is one major issue and much too small for many industrial applications. To improve the productivity and throughput, increasing the applied average power is a key parameter. Therefore, ultrafast lasers with high average power have the potential to scale up the productivity and reduce the processing times significantly. We present investigations on the processing of metals with a multi-100 W ultrafast laser system with pulse repetition rates of up to 20 MHz. For such power levels and high repetition rates effects like heat accumulation and shielding by pulse-plume interactions occur and have to be taken into account. We describe the relevance and impact of process parameters like spatial pulse separation, repetition rate and pulse duration on the productivity of the ablation process. A theoretical model is presented to distinguish between the influences of the aforementioned effects on the experimental results. Moreover, the fabrication of surface structures utilizing multi-100 W average power is presented.