研究目的
To investigate the morphological properties and composition of the Ag nanoparticles deposited on the ITO/glass substrate by means of plasma-assisted hot-filament evaporation, as well as to correlate these properties with the corresponding optical and electrical properties essentially required in OLED applications.
研究成果
The deposition of Ag nanoparticles on the ITO/glass substrate at low substrate temperatures of less than 200°C can be expected to improve the vertical conductivity and luminance of OLEDs due to the high conductivity and high SPR absorption of the Ag nanoparticles.
研究不足
The high reaction temperatures usually lead to the destruction of device layers during the deposition process. However, this setback can be avoided by using the conventional thermal evaporation technique and adopting hot-filaments into the system.
1：Experimental Design and Method Selection
Ag nanoparticles were deposited on ITO coated glass substrates using a plasma-assisted hot-filament evaporation system. The deposition was conducted in a home-built vacuum reaction chamber with a radio frequency (RF) electrode connected to an RF power supply of 13.56 MHz. A tungsten wire was used as a hot-filament to evaporate an Ag wire.
2：Sample Selection and Data Sources
ITO coated glass substrates were cleaned using Decon 90 diluted in deionised water, with additional ultra-sonication done at 60°C for 60 minutes. The substrates were sequentially rinsed in deionised water, acetone, and isopropyl alcohol, and dried with purified nitrogen gas.
3：List of Experimental Equipment and Materials
Hitachi SU 8000 SEM, JEOL JEM-2100F TEM, PANalytical Empyrean X-ray diffractometer, Thermo VG Scientific CLAM2 electron spectrometer, UV–VIS–NIR spectrophotometer (Lambda 750, PerkinElmer), Keithley 2420 source measure unit.
4：Experimental Procedures and Operational Workflow
The substrates were placed inside the chamber, evacuated at the minimum pressure of around 5 × 10-3 Pa. Prior to the deposition, the substrates underwent the plasma cleaning (PC) process using hydrogen plasma. The deposition was started by opening the shutter subsequent to the PC process. The substrate temperature was varied between 25°C and 250°C.
5：Data Analysis Methods
Field emission scanning electron microscopy (FESEM) images of the nanoparticles were obtained. ImageJ analysis software was used to determine the size, population, area filling fraction, and interparticle separation of the nanoparticles. The transmission electron microscopy (TEM) and high-resolution TEM images of the nanoparticles were collected. The X-ray diffraction (XRD) patterns were recorded. The chemical oxidation states of the Ag nanoparticles on ITO/glass were examined using X-ray photoemission spectroscopy (XPS).
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