研究目的
Investigating the fabrication and testing of extrinsic fiber Fabry-Perot interferometric acoustic sensors based on corrugated silver diaphragms for weak acoustic sensing.
研究成果
The study demonstrated the fabrication of high-sensitivity, low-cost optical acoustic sensors based on corrugated silver diaphragms suitable for weak acoustic sensing. The introduction of corrugations improved sensor sensitivity, reduced minimal detectable pressure, and expanded dynamic range, though optimal corrugation depth must be carefully designed to avoid performance degradation.
研究不足
The flexibility to adjust the corrugation’s parameters is limited compared to previous methods, and the presence of wrinkles in the diaphragm’s flat zone may affect sensor performance.
1：Experimental Design and Method Selection:
The study involved the fabrication of corrugated silver diaphragms using a simple and low-cost method, transferring corrugations from silicon to silver diaphragms with photoresist as a sacrificial layer.
2：Sample Selection and Data Sources:
Sensors with different corrugation depths were fabricated and tested.
3：List of Experimental Equipment and Materials:
Silicon wafers, photoresist, silver for diaphragms, and optical spectrum analyzer were used.
4：Experimental Procedures and Operational Workflow:
The corrugations were etched on silicon, transferred to silver diaphragms, and sensors were assembled and tested for frequency response, noise, and dynamic range.
5：Data Analysis Methods:
Mechanical sensitivities were calculated and compared with theoretical predictions, and sensor performances were evaluated based on frequency response, minimal detectable pressure, and dynamic range.
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