研究目的
Investigating the effect of plasmonic lens distribution on flight characteristics in rotational near-field photolithography.
研究成果
The research demonstrates that the position of the plasmonic lens significantly affects the flight height of the lithographic head, with an edge effect observed when the PL is fabricated in the edge region. Optimizing the PL's placement within 5 μm to 15 μm from the edge of the tail improves flight stability and enables effective flight height below 11 nm. This optimization leads to stable and uniform pattern fabrication with a linewidth of 37 nm, enhancing the robustness of RNFP systems and promoting their industrialization.
研究不足
The study is limited by the computational fluid dynamics model used, which may not fully capture all physical phenomena at the nanoscale. Additionally, the experimental validation is conducted under specific conditions, which may not be generalizable to all operational scenarios.
1：Experimental Design and Method Selection:
The study uses computational fluid dynamics analysis to investigate the flight state of a PL-loaded lithography head on the air film. The methodology includes solving the modified Reynolds equation for rarefied gas lubrication to analyze the pressure distribution and flight height of the ABS equipped with a PL.
2：Sample Selection and Data Sources:
The research focuses on the lithography flight head carrying a plasmonic lens, with an approximately 10 nm spacer from the substrate.
3：List of Experimental Equipment and Materials:
The study involves the use of a chromium film for the PL, a quartz substrate for the ABS structure, and a 355 nm continuous laser as the light source.
4：Experimental Procedures and Operational Workflow:
The PL is fabricated at the tail of the head slider, and its effect on the flight characteristics is studied by moving its position with randomly chosen intervals in the edge region.
5：Data Analysis Methods:
The pressure distribution field of each case is solved, and the minimum flight height is summarized. The relationship between the PL placement and the minimum flight height is analyzed using the cumulative distribution function (CDF).
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