摘要： This paper presents an e?cient pathway to achieve the dielectric constant as low as 2.48 @ 25 °C, 1 MHz for nonporous poly(imide siloxane) ?lms with mechanical and thermal robustness. A symmetric disiloxane-linked alkyl diamine, bis(aminopropyl)tetramethyldisiloxane (BATMS) with a well-de?ned molecular formula NH2CH2CH2CH2Si-(CH3)2OSi(CH3)2CH2CH2CH2NH2, has been used to controllably reduce the dielectric constant of the polymer ?lms by adjusting the loading of BATMS. The thermal stability of all the polymer ?lms remains robust with T5 and T10 no less than 458 and 472 °C, respectively, while the glass-transition temperature decreases with increasing incorporation of ?exible disiloxane-alkyl segments into a polymer backbone. There exists a consistent regularity between the thermal, optical, and dielectric properties with the loading amount of BATMS in the polymer ?lms, inferring that the disiloxane-alkyl segments are homogeneously distributed in the polymer backbone. Charge-transfer complex inhibition of polymer ?lms by disiloxane segments has been revealed by an enlarged d-spacing in wide-angle X-ray di?raction spectra and a blue shift in ?lm ?uorescence emission spectra. The combined low dielectric constant, robust mechanical and thermal stability, and improved hydrophobicity make the series of BATMS-resulting poly(imide siloxane) ?lms promising candidates for sophisticated ?exible microelectronic application.