研究目的
To develop an analytical model of phase noise in an oven-controlled MEMS resonator and understand its behavior like 1/f noise.
研究成果
The analytical model reveals that the 1/f like phase noise is up-converted of the self-heating noise of the spring constant. The model matches the experiments qualitatively, with a deviation of about 10dB. The phase noise in mechanical resonators is approximately proportional to Q2 when f approaches 0.
研究不足
The deviation between the theoretical results and the experiment is about 10dB when the Fourier frequency, f, is lower than 10Hz. The accuracy of the model is affected by the thermal conductivity and thermal diffusivity of silicon, which are functions of temperature, doping, and the size of the structure.
1：Experimental Design and Method Selection:
The study involves developing an analytical model for phase noise in MEMS resonators and comparing it with experimental results.
2：Sample Selection and Data Sources:
A micro-oven-controlled silicon resonator fabricated on a silicon-on-insulator (SOI) wafer is used.
3：List of Experimental Equipment and Materials:
Includes a source analyzer (Keysights E5052B) for measuring phase noise.
4：Experimental Procedures and Operational Workflow:
The resonator is electrically heated to the turnover temperature, and a small voltage is coupled to the excitation voltage to simulate white noise voltage.
5：Data Analysis Methods:
Theoretical results are calculated with an equivalent circuit model and compared with experimental results.
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