研究目的
To report a large-aperture, 2-axis electrothermal MEMS mirror for LiDAR applications, achieving long distance, high resolution, and stable laser scanning needed for robotics and automobiles.
研究成果
An electrothermal MEMS mirror with a relatively-large aperture of 2×2.5 mm2 has been demonstrated. This MEMS mirror can generate large raster scan at low driving voltage. Due to the increased aperture size, divergence angle as small as 0.5 mrad has been achieved. This electrothermal MEMS mirror has great potential to be used for LiDAR scanners.
研究不足
The study focuses on the design and fabrication of a large-aperture MEMS mirror for LiDAR applications, but does not extensively discuss the integration of the mirror into a complete LiDAR system or its performance under various environmental conditions.
1：Experimental Design and Method Selection:
The MEMS mirror is electrothermally-actuated and based on the inverted-series-connected (ISC) bimorph actuation structure. SiO2 and Al are used as the two bimorph materials while Pt is used as the embedded heater material. The mirror plate is 47 μm thick to balance the mass of the mirror plate and the surface flatness. A meshed ISC actuator structure is designed with a pair of ISC bimorph parallelly connected to double the stiffness without losing the actuation range.
2：Sample Selection and Data Sources:
The device fabrication is similar to the one reported in previous work.
3：List of Experimental Equipment and Materials:
A He-Ne laser, expanded using a 2× beam expander, was incident on the MEMS mirror plate with a beam diameter of
4：3 mm. The curvature of the mirror surface was measured with a Bruker Optical Profilometer. Experimental Procedures and Operational Workflow:
The quasi-static response and frequency response of the MEMS mirror were measured. An optical experiment was performed to characterize the beam propagation profile.
5：Data Analysis Methods:
The measured radius of curvature was about 2.0 m. The divergence angles were measured for comparison between different mirrors.
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