1：Experimental Design and Method Selection:

The study involved the use of ultrashort-pulsed laser radiation for the selective rear-side ablation of aluminum thin layers on fused silica. The laser parameters included wavelength (λ = 1028 nm), pulse duration (??H = 0.2–10 ps), and beam radius (w0,86 = 15.2 μm).

2：2–10 ps), and beam radius (w0,86 = 2 μm). Sample Selection and Data Sources:

2. Sample Selection and Data Sources: Aluminum thin layers with thicknesses of 10, 20, 30, and 50 nm on fused silica substrates were used. The layers were deposited by sputtering.

3：List of Experimental Equipment and Materials:

The ultrashort pulse laser Pharos from Light Conversion Ltd. was used, along with a 167 mm f-theta objective for focusing the laser beam. An optical microscope and atomic force microscope (AFM) were used for post-irradiation analysis.

4：Experimental Procedures and Operational Workflow:

The laser beam was focused through the transparent substrate at the interface between the metallic layer and the fused silica substrate. The samples were irradiated with increasing pulse energy, different pulse numbers, and pulse durations. The ablation craters were then analyzed for morphology and size.

5：Data Analysis Methods:

The ablation diameters were measured to determine the ablation thresholds and incubation coefficients. Theoretical threshold fluences for melting and evaporation processes were calculated and compared with experimental data.