研究目的
Investigating the foldability and performance of poly-Si thin-film transistors (TFTs) on polyimide (PI) substrates using blue laser annealing (BLA) compared to conventional excimer laser annealing (ELA) for foldable displays.
研究成果
The BLA poly-Si TFTs on PI substrates exhibit superior foldability and electrical performance compared to ELA poly-Si TFTs. The absence of protrusions in BLA poly-Si leads to fewer defects during folding, resulting in minimal threshold voltage shift. This makes BLA a promising method for fabricating robust TFTs for foldable displays.
研究不足
The study is limited to the comparison of BLA and ELA poly-Si TFTs on PI substrates. The impact of other crystallization methods or substrates is not explored. The folding tests are conducted up to 30,000 cycles, and the long-term stability beyond this is not investigated.
1：Experimental Design and Method Selection:
The study compares the performance and foldability of poly-Si TFTs fabricated using BLA and ELA on PI substrates. The BLA process is chosen for its potential to produce larger grain sizes and fewer defects.
2：Sample Selection and Data Sources:
Poly-Si TFTs are fabricated on PI substrates using both BLA and ELA methods. The samples are characterized for electrical performance and mechanical stability under folding.
3：List of Experimental Equipment and Materials:
Equipment includes blue laser annealing system, excimer laser annealing system, and characterization tools like SEM, AFM, and TEM. Materials include amorphous silicon (a-Si) and polyimide (PI) substrates.
4：Experimental Procedures and Operational Workflow:
The a-Si layer is deposited on PI substrates, followed by crystallization using BLA or ELA. The TFTs are then fabricated and subjected to folding tests to evaluate mechanical stability.
5：Data Analysis Methods:
Electrical performance parameters (mobility, threshold voltage, subthreshold swing) are measured before and after folding. Structural analysis is performed using SEM, AFM, and TEM to observe grain structure and defects.
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