研究目的
Investigating the fabrication and performance of ultrathin microscale platinum resistive thermometers on transparent oxide substrates using femtosecond laser patterning for transient temperature measurements.
研究成果
The research successfully demonstrated the fabrication of stable, 50 nm thick Pt high-temperature sensors on transparent oxide substrates using femtosecond laser machining. Sensors on sapphire and silica with alumina adhesion showed repeatable TCR performance up to 650oC. The study highlighted the importance of substrate and capping layer selection for sensor stability and proposed annealing before laser machining as a strategy for further size reduction.
研究不足
The study identified limitations in sensor size reduction below 50μm due to mechanical integrity issues and adhesion challenges. High-temperature stability was limited to 650-800oC, with degradation observed above 800oC due to agglomeration.
1：Experimental Design and Method Selection:
The study involved the fabrication of Pt thin film sensors on transparent oxide substrates using femtosecond laser machining. The methodology included blanket thin film deposition, shadow masked wet etching, and laser machining of sensor patterns.
2：Sample Selection and Data Sources:
Samples were prepared on sapphire and silica substrates with various adhesion and capping layers. In-situ resistance monitoring was used to assess thermal stability.
3：List of Experimental Equipment and Materials:
Equipment included a femtosecond pulsed laser (800nm, 1 kHz, Spitfire, Spectra-physics), tube furnace (Lindberg), and digital data logger (HIOKI LR8431). Materials included Pt thin films, Al2O3 and TiO2 adhesion layers, and PECVD oxide capping layers.
4：1). Materials included Pt thin films, Al2O3 and TiO2 adhesion layers, and PECVD oxide capping layers.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The fabrication process involved deposition of adhesion, Pt, and capping layers, masked etching to expose Pt for electrical contact, and laser machining of sensor patterns. Thermal cycling tests were conducted to evaluate sensor performance.
5：Data Analysis Methods:
Temperature Coefficient of Resistance (TCR) was calculated from resistance measurements during heating and cooling cycles to assess sensor stability and performance.
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