研究目的
To review the progress in research and application of Micro-Laser-Induced Breakdown Spectroscopy (μLIBS), including its advantages over conventional LIBS, its application fields, and the existing problems and potential development directions.
研究成果
μLIBS has advantages such as simple sample preparation, low environmental requirements, and rapid analysis, making it widely applicable in various fields. However, challenges remain in quantitative accuracy, detection limits, and non-planar analysis.
研究不足
The accuracy of quantitative analysis at the microscopic spatial scale needs improvement. The detection limit of microanalysis is higher than conventional analysis, making trace element detection difficult. Analysis of non-planar structural parts requires further research.
