研究目的
To investigate the damage of black glass in a high laser fluence system before and after surface treatment by SiO2 films, focusing on the laser-induced damage threshold (LIDT), morphology, and depth, and to analyze the effect of impurities on the damage of the films.
研究成果
The study concludes that coating black glass with SiO2 films can improve its ability to absorb stray light, but the presence of impurities in the films drastically reduces the LIDT. The damage mechanism involves thermal melting and stress-induced failure due to impurities. The findings suggest that reducing impurities is crucial for improving the LIDT of thin films in ultra-clean manufacturing processes.
研究不足
The presence of impurities in the films significantly reduces the LIDT, indicating a need for methods to reduce impurity introduction during film preparation. The study also highlights the technical constraints of achieving ultra-clean manufacturing in laser systems.
1：Experimental Design and Method Selection:
The study involved simulating the temperature field and von Mises stress field of the substrate and film using the finite element method to calculate the LIDT. Black glass was placed in a cavity to absorb stray light, and the damage law of the material was analyzed. The influence of impurities on the damage of the film was also simulated.
2：Sample Selection and Data Sources:
Black glass samples were used before and after being coated with SiO2 films. The samples were prepared by magnetron sputtering, and their LIDT was tested.
3：List of Experimental Equipment and Materials:
Equipment included a Nd:YAG laser, focusing lens, attenuator, aperture, an EPM2000 energy calorimeter, a sample carrier, an optical microscope, and a computer. Materials included black glass and SiO2 films.
4：Experimental Procedures and Operational Workflow:
The LIDT testing experiment used the 'r-on-1' test method, where the same point on the sample was tested by gradually increasing the energy until damage occurred. Each sample was tested at 3 points.
5：Data Analysis Methods:
The LIDT was calculated by averaging the results from the test points. The damage morphology was observed using a Keynes VHX-1000 ultra-depth-of-field optical microscopy system.
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