研究目的
To adopt the coded aperture technique to the alignment process for industrial machinery and optimize the aperture pattern by performing a simulation of light diffraction to achieve better performance in the alignment.
研究成果
The study demonstrates that the coded aperture technique can improve the alignment process for industrial machinery by optimizing the aperture pattern with respect to light diffraction. The proposed aperture pattern achieves better performance in alignment accuracy compared to conventional patterns, especially in settings with narrow wavelength range illumination where diffraction effects are significant.
研究不足
The study assumes that the distance from the camera to the object plane is known and does not address the estimation of defocus length from the unfocused image. The simulation of light diffraction is performed only for a defocus length of 100 μm, which may not cover all possible defocus lengths in practical applications.
1：Experimental Design and Method Selection:
The study involves optimizing the aperture pattern by performing a simulation of light diffraction and comparing the performance of different aperture patterns in the alignment process.
2：Sample Selection and Data Sources:
The study uses alignment marks on products for template matching to evaluate the accuracy of the alignment.
3：List of Experimental Equipment and Materials:
The experimental device includes a lens of own design, an image sensor (acA2500-14gm/gc by Basler), and a light source with K?hler illumination.
4：Experimental Procedures and Operational Workflow:
The study captures images with known defocus lengths, measures the PSF, and evaluates the accuracy of the alignment through template matching.
5：Data Analysis Methods:
The study uses Wiener deconvolution for image restoration and evaluates the alignment accuracy by calculating the Euclidean distance between the true and detected positions of the alignment marker.
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