研究目的
To study the influence of varying plasma enhanced chemical vapor deposition (PECVD) parameters on the passivation quality and the properties of silicon heterojunction (SHJ) solar cells, focusing on suppressing undesired epitaxy growth to achieve high passivation quality and subsequently a higher Voc for SHJ solar cells.
研究成果
Optimizing PECVD deposition parameters, specifically high P × Di and R values, can suppress unwanted epitaxial growth, leading to high passivation quality and Voc in SHJ solar cells. The best Voc of 670 mV was achieved at P × Di of 48 Torr·mm and R of 6.86%.
研究不足
The study is limited by the technical constraints of the PECVD system and the potential for powder formation-induced higher defect density within a-Si:H films at high P × Di values. The exact mechanism underlying the observed higher FF and Jsc for cells with certain R values needs further investigation.
1：Experimental Design and Method Selection:
The study involved varying PECVD parameters such as the product of the gas pressure (P) and the electrode distance (Di) and the hydrogen dilution ratio (R) to investigate their effects on passivation quality and SHJ solar cell characteristics.
2：Sample Selection and Data Sources:
Commercially available textured solar-grade n-type (100) c-Si wafers were used, cleaned by the standard RCA process followed by dipping in diluted HF solutions.
3：List of Experimental Equipment and Materials:
PECVD system, QSSPC system (WCT-120, Sinton Instruments), McScience solar simulator system, Keithley 2401 Sourcemeter, OSLAM Xe lamp, HRTEM (JEM-2100F).
4：Experimental Procedures and Operational Workflow:
i-a-Si:H films were deposited on both sides of cleaned wafers under varying P × Di and R values. MCLTs and implied Voc were measured using QSSPC. SHJ solar cells were fabricated and their J-V characteristics measured.
5：Data Analysis Methods:
The passivation qualities were analyzed based on MCLT measurements and compared with device parameters of fabricated SHJ solar cells. HRTEM images were used to characterize microstructures.
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