研究目的
Investigating the application of a fast scanning method coupled with digital image processing technology as a standard acquisition mode for scanning electron microscopy to replace the conventional slow-scan mode, aiming to suppress the adverse effects of charging in a full-vacuum condition.
研究成果
The study demonstrated that a fast scanning method coupled with digital image processing technology can effectively replace the traditional slow-scan mode in SEM, providing images of the same quality in terms of sharpness and noise while suppressing the adverse effects of charging in a full-vacuum condition. The method involves the use of an inverse filter and sophisticated image integration techniques, showing promise for future applications in SEM imaging.
研究不足
The study acknowledges that the characteristics of the frequency of SEM signal detection systems have not yet matured, which could affect the results. Additionally, the method may require adjustments under different image acquisition conditions.
1：Experimental Design and Method Selection:
The study proposed a fast scanning method (TV scan) coupled with digital image processing to replace the conventional slow-scan mode in SEM. The method involved using an inverse filter based on the characteristics of the frequency of a TV-scan image and an accurate technique of image integration with position alignment robust against noise.
2：Sample Selection and Data Sources:
SEM images of nonconductive specimens were used to evaluate the proposed method.
3：List of Experimental Equipment and Materials:
A Hitachi S-3400N general-purpose SEM was used, along with a personal computer controlled with LabVIEW and a DVI3USB 3.0 video grabber for lossless video capture.
4：0 video grabber for lossless video capture.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: TV-scan SEM digital video signals were continuously acquired and processed using the proposed digital image processing techniques, including inverse filtering and image integration with position alignment.
5：Data Analysis Methods:
The quality of SEM images obtained using the proposed method was compared with those obtained using the conventional slow-scan mode in terms of sharpness, noise, and suppression of charging effects.
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