研究目的
To develop an equivalent circuit model of a finite ground coplanar waveguide (FGCPW) interconnect in a metal-insulator-semiconductor (MIS) system for ultra-broadband monolithic ICs, enabling quick and efficient time domain simulation to estimate time delay and bandwidth.
研究成果
The proposed equivalent circuit model for FGCPW interconnects in MIS systems is validated through comparisons with Q3D extractions, HFSS simulations, and physical measurements. Despite overestimating the interconnect bandwidth beyond 71 GHz, the model is useful for time domain simulations within the quasi-TEM mode dominance range.
研究不足
The model assumes only quasi-TEM CPW mode propagation, which becomes inapplicable at frequencies exceeding 71 GHz where TE0 mode interaction becomes appreciable. The interconnect bandwidth may be overestimated due to this limitation.
1：Experimental Design and Method Selection:
The study proposes an equivalent circuit model for FGCPW interconnects in MIS systems, incorporating an effective substrate model considering Maxwell-Wagner Polarization and a method for modeling the weak skin effect of the conductor.
2：Sample Selection and Data Sources:
The interconnect dimensions and material properties are specified, with comparisons made to Ansoft Q3D extractions and HFSS simulations.
3：List of Experimental Equipment and Materials:
Anritsu 40 GHz Vector Network Analyzer (VNA), GGB 85 μm GSG probe, and calibration substrate for SOLT calibration.
4：Experimental Procedures and Operational Workflow:
The equivalent circuit parameters are calculated and compared to Q3D extractions. S-parameters are simulated using the equivalent circuit and compared to HFSS simulations and physical measurements.
5：Data Analysis Methods:
The accuracy of the equivalent circuit model is evaluated through comparison with Q3D extractions, HFSS simulations, and physical measurements.
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