研究目的
To suggest a novel structure for silicon photonic coupled-ring-resonator with an order of scale difference in the rings’ lengths and sensitivity analysis for this structure, aiming to improve the performance of optical sensing and filtering.
研究成果
The suggested novel structure of coupled ring-resonator with order of scale difference in length demonstrated improved finesse and quality factor, with respect to conventional resonator structures. The silicon photonics device showed enough robustness to fabrication tolerance and was experimentally characterized demonstrating improved finesse and a quality factor that is larger than 17,000.
研究不足
The fabrication tolerance affects the response of the design by some type of variation, including resonance wavelength, FWHM, suppression of the others modes, and transmission losses. The experimental results showed lower finesse than the simulated one, attributed to fabrication tolerance.
1：Experimental Design and Method Selection:
The design process began by choosing the width of the waveguide to achieve minimum surface roughness losses and excess bending loss. The silicon core is surrounded by silicon dioxide, with air at the top. The quasi transverse magnetic (TM) mode was chosen for maximum sensitivity.
2：Sample Selection and Data Sources:
The design consists of a long racetrack resonator nested by a ring resonator of minimized radius to avoid bending loss.
3：List of Experimental Equipment and Materials:
The structure was fabricated using DUV lithography and silicon etching ePIXfab by the IMEC fabrication facility.
4：Experimental Procedures and Operational Workflow:
The light enters via an input grating coupler into the input waveguide, is coupled into the resonator, circulates until the second directional coupler, and then a portion is coupled to the output port.
5：Data Analysis Methods:
The transfer function of the structure was expressed and analyzed for variations in design parameters to assess fabrication tolerance.
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