研究目的
Exploring Piezoelectric Micromachined Ultrasound Transducers (PMUTs) as a potential MEMS solution for fluid property monitoring, specifically focusing on density and viscosity sensing in water-glycerol mixtures.
研究成果
PMUTs with diameters between 250 μm to 1000 μm were fabricated and their vibration response spectra were correlated to the density and viscosity of the surrounding fluid. A novel PMUT-fluid-PMUT architecture was used for monitoring changes in a glycerol-water mixture, showing density sensitivity up to 365 Hz/Kg.m-3 for 250 μm diameter PMUTs. This approach has the potential to fill the current gap of miniaturized fluid sensors for a variety of applications.
研究不足
The experimental setup was limited to only one transmit and one receive channel due to instrumentation limitations of the lock-in-amplifier. Further investigations are required to ascertain the effects of disagreements between experimental results and theoretical formulations.
1：Experimental Design and Method Selection:
PMUTs with diameters of 1000 μm, 500 μm, and 250 μm were fabricated and tested in water-glycerol mixtures to monitor changes in fluid properties. A PMUT-Fluid-PMUT (PFP) architecture was proposed for continuous monitoring.
2：Sample Selection and Data Sources:
Glycerol-water mixtures with concentrations varying between 0% to 80% were used as test fluids.
3：List of Experimental Equipment and Materials:
PZT based PMUTs, Laser Doppler vibrometer (Polytec MSA 500), peristaltic pump, lock-in amplifier.
4：Experimental Procedures and Operational Workflow:
PMUTs were submerged in test fluids, and their vibrational responses were measured using LDV. The PFP setup was used to capture changes in the transfer function correlating with fluid properties.
5：Data Analysis Methods:
The shifts in the first resonant peak of the PMUT output were correlated to the density of the fluid medium, and the quality factor of the resonance was related to viscosity.
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