摘要： In the recent developments of laser processing technology, there has been exponentially growing interest in surface structuring. A wide variety of shapes and sizes can be achieved for the structures depending on the laser parameters applied. In this chapter, we will be focusing on nanoscale surface structuring. Laser surface nanostructuring is such an attractive process, from a technological point of view, as it is so simple. Nanostructures can be generated on a large surface area using a single-step process; this is impossible on hard brittle materials by any other methods. However, as is the case with many simple technologies, the fundamental science behind it is highly complex. Surface structure generation is attributed to a complex combination of inter- and intrapulse physical processes. This chapter will attempt to clarify the scientific processes of the nanostructure formation mechanism, to describe recent trends in nanostructuring technology, and to present innovative applications of nanostructured surfaces with particular focus on the surface nanostructuring of silicon and zirconia.