研究目的
To devise a compact flexure-based stage, which can be mounted on the top of an XY stage for constructing a hybrid type of XYZ stage dedicated to micro/nanopositioning applications.
研究成果
The designed compact vertical micro/nanopositioning stage is desirable for the applications with limited operation space. The experimental results demonstrate that the stage owns the resonant frequency of 199.22 Hz and maximum output displacement of 97.32 μm. Closed-loop tests with PID feedback control show that the stage provides a positioning resolution better than 10 nm along with satisfactory response speed and accuracy for motion tracking tasks.
研究不足
The discrepancies between the experimental and simulation results are mainly attributed to the fabrication error, assembly error, and simulation error.
1：Experimental Design and Method Selection:
The design involves a new compact one-degree-of-freedom (1-DOF) compliant stage driven by a piezoelectric actuator (PEA) for micro/nanopositioning in the vertical direction. An orthogonal compound bridge-type amplifier is introduced to amplify the displacement of the PEA.
2：Sample Selection and Data Sources:
The stage is designed to fulfill the performance requirement with high compactness and lower height. The material of Al-7075 is chosen in the FEA model.
3：List of Experimental Equipment and Materials:
A PEA (model: TS18-H5-202, from Piezo Systems Inc.) is selected as the actuator. The experimental setup includes a personal computer (PC), data acquisition (DAQ) device (NI cRIO-9022 with NI-9263 and NI-9215 modules, from National Instruments Inc.), voltage amplifier (model: EPA-104-230, from Piezo Systems, Inc.), and capacitive sensor (model: D-510.050, from Physik Instrumente (PI) GmbH & Co. KG).
4：050, from Physik Instrumente (PI) GmbH & Co. KG).
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The prototype components are manufactured via wire-EDM and computer numerical control (CNC) lathe and assembled together. Open-loop and closed-loop tests are carried out to verify its real performance.
5：Data Analysis Methods:
The performance of the stage is evaluated with and without external loading by simulation study with the finite-element analysis (FEA).
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