研究目的
To study the effects of different structural parameters on wafer warpage and thermal stress in electronic packages using ABAQUS for three-dimensional numerical simulation from the thermodynamic point of view.
研究成果
The structural parameter that has the greatest influence on the von Mises stress value is the window opening size, and the Die thickness has the greatest influence on the wafer warpage value. Under optimized process parameters, both the von Mises stress and wafer warpage are significantly reduced compared to the initial process.
研究不足
The study is based on simulation and may not fully capture all real-world manufacturing variances. Experimental validation is suggested for future research.
1:Experimental Design and Method Selection:
ABAQUS is used for three-dimensional numerical simulation. Single factor analysis, Taguchi orthogonal experiment design, and finite element analysis are combined to obtain optimized process parameters.
2:Sample Selection and Data Sources:
The study focuses on eSiFO packaging products.
3:List of Experimental Equipment and Materials:
ABAQUS finite element analysis software is employed.
4:Experimental Procedures and Operational Workflow:
The passivation process of eSiFO package is divided into two stages: pressing film and exposure & developing. The temperature changes during these stages are simulated.
5:Data Analysis Methods:
The maximum von Mises stress and the maximum warpage value are analyzed using Minitab software for SNR response tables.
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