研究目的
Investigating the control of surface figure in large flat optical elements fabrication through full-aperture polishing by proposing a novel model to calculate material removal distribution and resultant surface figure.
研究成果
The non-uniform material removal model for full-aperture polishing effectively predicts the final surface figure of workpieces, showing close agreement with experimental results. The study highlights the importance of considering kinematic parameters and pressure distribution derived from pad characteristics in controlling surface figure during polishing.
研究不足
The model's accuracy may be limited by assumptions such as uniform abrasive distribution and constant Preston coefficient across the contact interface. Additionally, the influence of pad viscoelastic properties and non-linear pressure increase at the workpiece edge were noted as factors introducing discrepancies between simulation and experimental results.
