研究目的
Investigating the formation mechanism of the needles and cracks in the low density ITO tablets during the electron beam evaporation process and proposing corresponding solutions.
研究成果
The formation of needles during EB evaporation is mainly due to the EB size and scan trace controlled by x and y axes scan signals, which can be solved by controlling the EB scan trace. The cracks problem can be solved by constructing a three-dimensional reticulated skeleton structure with blocky and porous regions. The ITO film shows high transmittance of 90% at 455 nm wavelength of GaN-based LED.
研究不足
The study focuses on the needles and cracks in ITO tablets during the electron beam evaporation process, with potential areas for optimization in the microstructure design to further enhance thermal shock resistance.
1：Experimental Design and Method Selection:
The study involved the fabrication of conventional and modified ITO tablets using nano- and sintered-ITO powders, followed by sintering and evaporation by electron beam to analyze needles and cracks.
2：Sample Selection and Data Sources:
The samples were ITO tablets with dimensions of Φ25×10 mm, fabricated from nano- and sintered-ITO powders.
3：List of Experimental Equipment and Materials:
Equipment included scanning electron microscopes (SEM) JSM-5610LV and F50, laser flash thermal constant analyzer TC-7000, electronic universal testing machine AG-X, and spectrophotometer V-
4：Experimental Procedures and Operational Workflow:
6 The tablets were sintered at 1350 °C under oxygen atmosphere and then evaporated by electron beam. Microstructure and ingredients were analyzed, and thermal conductivity, bending strength, and optical transmittance were measured.
5：Data Analysis Methods:
The microstructure and ingredients of the needles and tablets were analyzed by SEM, and thermal conductivity, bending strength, and optical transmittance were measured using specified equipment.
独家科研数据包，助您复现前沿成果，加速创新突破
获取完整内容
