研究目的
To review the current progress of MEMS technologies for PAI and summarize the recent advances of scanning mirrors and detectors in MEMS.
研究成果
MEMS technologies have significantly contributed to the advancement of PAI by improving imaging speed, resolution, and system compactness. However, challenges remain in miniaturization and fabrication processes for broader clinical applications.
研究不足
The review highlights the need for further optimizations for clinical use, including reducing the size of water immersible MEMS scanning mirrors for endoscopic applications and simplifying the fabrication process of MEMS detectors to reduce cost and increase reliability.
