研究目的
To outline the development of electromagnetic metrology in response to the reduction in the typical length scale of electronic components and circuits, and the introduction of novel materials like graphene, focusing on the application of a near-field scanning microwave microscope to nanoelectromechanical system resonators.
研究成果
The paper highlights the challenges and developments in electromagnetic metrology at the nanoscale, particularly with the advent of novel materials like graphene and the miniaturization of electronic components. The use of a near-field scanning microwave microscope demonstrates the potential for precise measurements of nanoscale electromagnetic properties, though further work is needed to accurately convert raw data into material parameters.
研究不足
The complexity of nanoscale electromagnetic measurements, especially with novel materials like graphene and NEMS resonators, presents challenges in accurately measuring properties such as conductivity and permittivity. The interaction between the NSMM tip and the sample can introduce ambiguities in distinguishing spatial from electrical variations.
1：Experimental Design and Method Selection:
The study employs a near-field scanning microwave microscope (NSMM) to investigate nanoscale electromagnetic properties, particularly focusing on nanoelectromechanical system (NEMS) resonators and graphene.
2：Sample Selection and Data Sources:
The research involves the use of graphene films and NEMS resonators as samples.
3：List of Experimental Equipment and Materials:
A home-built NPL NSMM consisting of a quarter wavelength coaxial resonator loaded by a high permittivity dielectric material, with a resonant frequency of 4 GHz.
4：Experimental Procedures and Operational Workflow:
The NSMM is used to make 2D scans across dielectric and conducting thin films, resolving changes in local properties. The system also detects mechanical resonances in freely suspended samples by modulating the amplitude of the microwave signal.
5：Data Analysis Methods:
The study involves converting scanned raw microwave resonance data to conductivity and permittivity of the underlying material, using circuit-based modelling and standard thin film conducting and insulating samples for calibration.
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