研究目的
Investigating the dependence of film thickness onto characteristic of Gallium doped Zinc Oxide (GZO).
研究成果
GZO thin films deposited at different thickness were successfully deposited onto glass substrate. Analysis of GZO films structure revealed all GZO films were polycrystalline with the preferential orientation of (0 0 2). The estimated grain size of GZO films were increase as the thickness increase indicated the improvement of crystal quality of films. The optical transmission pattern analysis shows fully transparent films with high transparency achieved with the optical band gap value for the GZO films is within 3.30-3.50 eV range. The studies revealed a strong influence of thickness on surface morphology of GZO films. It is concluded the growth characteristic, structural, optical and surface morphology of GZO films are greatly dependent on films thicknesses.
研究不足
The study focuses on the influence of film thickness on the growth characteristic, structural, optical properties and surface morphology of GZO films. Other factors such as different doping concentrations or substrate materials were not investigated.
