研究目的
Investigating the enhancement of hydrogen gas sensing properties of WO3 thin films by on-top deposited CuO nanoclusters.
研究成果
The addition of CuO nanoclusters to WO3 thin films enhances their sensitivity to hydrogen gas. The sensing mechanism is based on the formation of nano-sized p-n junctions between p-type CuO and n-type WO3. The GAS technique offers advantages for preparing high-purity sensorial materials without the need for post-treatment.
研究不足
The study did not test the long-term stability of the sensors. The working temperature was relatively high (300 °C) compared to optimized hydrogen sensors.
1：Experimental Design and Method Selection:
The study utilized a magnetron-based gas aggregation cluster source (GAS) to deposit CuO nanoclusters on sputter-deposited WO3 thin films. The sensitivity of these films to hydrogen gas was evaluated.
2：Sample Selection and Data Sources:
The specimens were prepared on Si(111) substrates with thermally grown SiO2. The amount of CuO clusters was varied to study their effect on the sensing properties.
3：The amount of CuO clusters was varied to study their effect on the sensing properties.
List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: Equipment included a magnetron sputtering system, SEM (Hitachi SU-70), XRD (X'Pert PRO, PANalytical), XPS (SPECS Phoibos MDC 9 energy analyzer), and a gas response analysis chamber.
4：Experimental Procedures and Operational Workflow:
WO3 films were deposited using reactive dc magnetron sputtering. CuO nanoclusters were deposited using GAS. The specimens' morphology, composition, and sensorial response to hydrogen were characterized.
5：Data Analysis Methods:
The sensitivity was defined as Ra/Rg or Rg/Ra, depending on the material's resistivity response to hydrogen. The response and recovery times were obtained by fitting the acquired data.
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