研究目的
Investigating the preparation and properties of amorphous coatings of AlFeCoNiCuZrV high entropy alloy using direct current magnetron sputtering (DCMS) in a mixed atmosphere of Ar and O2.
研究成果
The amorphous coatings were successfully fabricated by DCMS. The oxygen content RO significantly affects the surface morphology, hardness, and elastic modulus of the coatings. Optimal conditions for a smooth and dense amorphous coating were found at an RO of 30-50%.
研究不足
The study is limited to the effects of O2 flow ratio on the properties of amorphous coatings. The potential for optimization in other parameters or conditions is not explored.
1：Experimental Design and Method Selection:
The amorphous coatings were deposited by DCMS in a mixed atmosphere of Ar and O2. The effect of O2 flow ratio on the morphology and mechanical properties of the coating was studied.
2：The effect of O2 flow ratio on the morphology and mechanical properties of the coating was studied.
Sample Selection and Data Sources:
2. Sample Selection and Data Sources: AlFeCoNiCuZrV alloy ingot was fabricated in a vacuum furnace under argon atmosphere. Quartz glass wafers were used as substrates.
3：List of Experimental Equipment and Materials:
Direct current magnetron sputtering equipment, X-ray diffractometer (XRD), field-emission scanning electron microscopy (FESEM), nanoindenter.
4：Experimental Procedures and Operational Workflow:
The substrates were cleaned and placed about 10 cm from the target. Coatings were deposited with various O2 flow ratios, and their microstructure and properties were analyzed.
5：Data Analysis Methods:
XRD for phase analysis, FESEM for microstructure analysis, nanoindenter for hardness and elastic modulus measurement.
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