研究目的
To enhance the Q-factor of the SAW resonator by analyzing various electrode materials and obtaining the optimum SAW design using COMSOL Multiphysics.
研究成果
The SAW resonator with silver electrode exhibits the highest Q-factor of 14000 at 1914 MHz, making it the optimum electrode material for SAW resonators. The sensitivity can be further improved by varying the electrode material.
研究不足
The study is based on simulations using COMSOL Multiphysics, and actual experimental validation with fabricated devices may reveal additional constraints or areas for optimization.
1：Experimental Design and Method Selection:
The study involves the simulation of SAW resonators with different electrode materials using COMSOL Multiphysics to analyze their Q-factor and displacement.
2：Sample Selection and Data Sources:
The piezoelectric substrate used is LiNbO3 (Lithium Niobate), and the electrode materials analyzed include silver, aluminium, gold, platinum, copper, and tungsten.
3：List of Experimental Equipment and Materials:
COMSOL Multiphysics software for simulation.
4：Experimental Procedures and Operational Workflow:
The SAW resonator with IDTs placed over the dielectric substrate is analyzed for different electrode materials, focusing on the Ultra High Frequency (UHF) range.
5：Data Analysis Methods:
The Quality factor is plotted against frequency, and the displacement of surface acoustic wave for various electrode materials is analyzed.
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