研究目的
Investigating the operation of a piezoelectric resonating force sensor at the second flexural vibration mode for precise force measurements.
研究成果
The resonance frequency-force relation from the analytical model agrees with the FEA results, but the coupling factor is lower than that from FEA in the large force region, due to the static approach of the analytical model.
研究不足
The analytical model is based on static analysis, which may differ from the dynamic approach of FEA, especially in the large force region. The de?ection shape in the FEA result may differ from the theoretical one in the large force region.
1：Experimental Design and Method Selection:
The study involves an analytical model based on the energy method and finite element analysis (FEA) to investigate the resonance frequency and piezoelectric coupling of the sensor.
2：Sample Selection and Data Sources:
A metal bridge coated with a piezoelectric film is used as the sensor device.
3：List of Experimental Equipment and Materials:
The sensor device is configured as a fixed-fixed bridge with tension forces at the ends, using a brass alloy as the bridge material and an aluminum-scandium nitride (AlScN) thin film as the piezoelectric material.
4：Experimental Procedures and Operational Workflow:
The analytical model is based on the energy method, and FEA is carried out using COMSOL Multiphysics
5：Data Analysis Methods:
The resonance frequency and coupling factor are analyzed and compared between the analytical model and FEA results.
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