研究目的
Designing and fabricating high-re?ectivity Cr/C multilayers for Ni-like Ta soft X-ray lasers operating at 44.8 ?.
研究成果
The study successfully fabricated Cr/C high-re?ectivity multilayers with varying bi-layer numbers, achieving the highest re?ectance of 13.2% with a bi-layer number of 300. The results indicate good interface quality with no significant roughness growth, although period thickness drift was observed to scale with bi-layer number. The findings suggest that Cr/C multilayers are promising for applications requiring high re?ectivity at wavelengths near the 'water window'.
研究不足
The main limitations include the short period thickness and the large bi-layer number needed for re?ectance saturation, which can lead to interface defects and period ?uctuation. Additionally, increasing the bi-layer number may not always enhance re?ectance due to roughness growth and layer thickness drifts.
1：Experimental Design and Method Selection:
The Cr/C multilayers were designed with a period thickness of
2：6 ? and a thickness ratio of carbon layer to period thickness of The multilayers were fabricated using the magnetron sputtering technique. Sample Selection and Data Sources:
Four Cr/C multilayers with bi-layer numbers of 150, 200, 250, and 300 were deposited onto super polished silicon wafers.
3：List of Experimental Equipment and Materials:
A direct current magnetron sputtering system was used for deposition. The materials included Cr and C targets with high purity.
4：Experimental Procedures and Operational Workflow:
The multilayers were characterized by grazing incidence X-ray re?ectance (GIXRR) and near-normal incidence re?ectance measurements at beamline 3W1B, BSRF. Transmission electron microscopy (TEM) was used to investigate the interface quality.
5：Data Analysis Methods:
The GIXRR data were fitted using a 'differential evolution' algorithm in Bede Refs software. The near-normal incidence re?ectance data were fitted using the Levenberg-Marquardt algorithm.
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