研究目的
To develop a sol–gel polymerization method for creating nanoporous polyimide silsesquioxane nanostructures as soft dielectric materials with ultralow dielectric constants.
研究成果
The sol–gel polymerization method successfully produced nanoporous PI SSQ nanostructures with ultralow dielectric constants, demonstrating potential for applications in nanoelectronics. Future work will focus on investigating the mechanical properties of these nanoparticles for use as interlayer dielectrics.
研究不足
The study faced challenges in controlling the particle size and uniformity, especially at higher base concentrations. The thermal stability of PMR-silane decreased compared to the original PMR-15 resin, and the method's applicability to other polymers was not explored.
1：Experimental Design and Method Selection:
A sol–gel polymerization method was developed to functionalize the polymer chain backbone and chain ends of PMR-15 resin with para-(chloromethyl)-phenylethyltrimethoxy silane, yielding a sol–gel reactive sites functionalized PMR-silane precursor. Base-catalyzed hydrolysis and condensation were then performed to produce PMR-SSQ nanoparticles.
2：Sample Selection and Data Sources:
PMR-15 resin was used as the starting material. The synthesis involved the use of potassium carbonate, N,N-dimethylformamide, ammonium hydroxide, and anhydrous ethanol among other chemicals.
3：List of Experimental Equipment and Materials:
Equipment included a 400 MHz Agilent magnet for NMR, Thermogravimetric analyzer Q500 for TGA, Hitachi S-4800 FESEM for SEM, and Carl Zeiss Libra 120 TEM for visualizing nanoporosity.
4：Experimental Procedures and Operational Workflow:
The PMR-silane precursor was synthesized via N-alkylation of amide groups of PMR-15 with BC-silane adduct. PMR-SSQ nanoparticles were then prepared through base-catalyzed hydrolysis and condensation, with particle size control attempted by adjusting the molar ratio between the silane precursor and the base.
5：Data Analysis Methods:
FTIR, TGA, SEM, TEM, and BET analysis were used to characterize the nanoparticles.
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