研究目的
To investigate the nonlinear forced vibration behavior of electrically actuated fully clamped microplates.
研究成果
The reduced order model accurately predicts the static and dynamic behavior of electrically actuated microplates. The microplate exhibits strong hardening behavior due to mid-plane stretching, switching to softening as the DC load increases. Dynamic pull-in instability occurs at lower vibration amplitudes with increased DC load.
研究不足
The study assumes negligible effect of squeeze-film damping, which might not be the case in all operational environments. The dynamic pull-in regime and highly fractal behavior require further investigation with other numerical techniques.
1：Experimental Design and Method Selection:
The study is based on a reduced order model developed using the Galerkin method, relying on modeshapes and in-plane shape functions extracted using a finite element method.
2：Sample Selection and Data Sources:
A fully clamped rectangular microplate is considered.
3：List of Experimental Equipment and Materials:
The commercial software COMSOL is used for finite element analysis.
4：Experimental Procedures and Operational Workflow:
The static behavior is investigated and validated by comparison with FEM results. The dynamic behavior is examined near the primary resonance with a harmonic AC load superimposed to a DC load.
5：Data Analysis Methods:
The system of differential algebraic equations is solved using the Runge Kutta method for time integration.
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