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The Post Annealing to Control the Number of Layers of 2D MoS2 and SnS2

DOI:10.1166/jnn.2016.13569 期刊:Journal of Nanoscience and Nanotechnology 出版年份:2016 更新时间:2025-09-04 15:30:14
摘要: We have demonstrated that post annealing could control the layer thickness of 2D MoS2 and SnS2 films transferred on a SiO2/Si substrate by varying the annealing temperature and time. Atomic force microscopy and Raman spectroscopy characterizations revealed that higher annealing temperature and longer treatment time led to thinner films, lower residues and fewer impurities on the surface of 2D materials. In addition, a higher possibility to attain few-layers on both 2D films was achieved using post annealing. The multiple layers of pristine films having the thickness over 15 nm were reduced down to bi-layers after annealing. We observed that the moderate annealing temperature of 450 °C on led to effective layer-thinning compared to the films annealed at 340 °C. The post annealing at 450 °C produced very smooth few-layers (≤4 nm thickness, >1 μm size) of 2D MoS2 and SnS2. However, the 2D films decomposed or disappeared at temperature greater than 650 °C. In addition, process time also affected the number of layers and the sweet spot turned out to be 2 to 3 hours in our experiment.
作者: Moonsuk Choi,Donghwan Lim,Andrey Sokolov Sergeevich,Seok Ki Son,Young Jin Kim,Hoon Hee Han,Changhwan Choi
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To demonstrate that post annealing could control the layer thickness of 2D MoS2 and SnS2 films transferred on a SiO2/Si substrate by varying the annealing temperature and time.

The study demonstrated that the thickness of 2D-MoS2 and SnS2 flakes could be modulated by the post-annealing process. The number of layers of both flakes is strongly dependent on the annealing temperature and time. Appropriate thermal treatment could be a control mechanism for the number of 2D atomic layers and lateral size of 2D-TMDs, which are important to manipulate the electrical and optical properties for various applications.

The study found that low temperature annealing at 340 °C is overall insufficient to reduce the thickness while the higher temperature annealing over 450 °C up to 650 °C induces the decomposition and disappearance of flakes leading to layer-thinning. The 2D films decomposed or disappeared at temperature greater than 650 °C.

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