研究目的
To design and simulate a differential pressure sensor using a double ring resonator integrated with a cantilever beam, measuring sensitivity in terms of shift in resonant wavelength.
研究成果
The designed differential pressure sensor achieves a sensitivity of 15.54 pm/kPa through simulation, demonstrating its potential for applications in aircraft, medicine, and automobiles. The use of a double ring resonator with Vernier effect enhances performance, but future work should include experimental fabrication and testing to validate the results.
研究不足
The study is based on simulations without experimental validation; real-world factors like manufacturing tolerances, environmental effects, and noise are not considered. The sensitivity might vary in practical applications, and the design is specific to the chosen dimensions and materials.
1：Experimental Design and Method Selection:
The sensor design involves a double ring resonator (radii 5μm and 4μm) on a silicon cantilever beam (100μm x 30μm x 5μm) using Silicon-on-Insulator (SOI) technology. The opto-mechanical effect is utilized where stress from differential pressure changes the refractive index, causing a wavelength shift. Simulation is performed using COMSOL Multiphysics for stress analysis and optical characteristics.
2：Sample Selection and Data Sources:
The setup is simulated with no physical samples; parameters are based on theoretical models and standard material properties (e.g., Young's modulus of Si = 170 GPa, stress optic coefficient = 1.56e-11 Pa^-1).
3：56e-11 Pa^-1).
List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: Simulated components include Si waveguides (width 500nm, height 220nm), SOI substrate (height 300nm), and a cantilever beam. Software: COMSOL Multiphysics version 5.0 for simulations.
4：0 for simulations.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: Differential pressures (-200 kPa, -100 kPa, 0 Pa, 100 kPa, 200 kPa) are applied to the cantilever. Stress and displacement are computed, leading to refractive index changes and wavelength shifts in the resonator. The output is analyzed at the drop port.
5：Data Analysis Methods:
Sensitivity is calculated as shift in resonant wavelength per kPa. Equations for stress, deflection, and optical phase changes are used, with results plotted for wavelength shifts.
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