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Interface intermixing and interdiffusion characteristics in MOVPE grown spontaneous AlxGa1-xAs/GaAs (100) superlattice structures using high resolution X-ray diffraction

DOI:10.1016/j.spmi.2019.01.001 期刊:Superlattices and Microstructures 出版年份:2019 更新时间:2025-09-23 15:22:29
摘要: Thermal diffusion characteristics in naturally grown ultra-nanoscale superlattice structures have been studied. In absence of any suitable direct experimental tool due to the physical resolution limit, here we rely on the theoretical analysis of x-ray rocking curve simulations coupled with the diffusion equation to arrive at the diffusion characteristics across the interfaces of spontaneously grown AlGaAs/AlGaAs superlattice structures. The simulation approach presented here is a combination of a virtual interdiffusion code and a code on x-ray diffraction. We have obtained the variation in the actual diffusion coefficient as a function of time at different temperatures from the decay rates of the integrated satellite peak intensities. We have also found the diffusion coefficient to be highly nonlinear across the interface with time. The satellite decay equation could fit the experimental data taking the maximum Al composition alone at each time step. The pre exponential factor and the activation enthalpy values for interdiffusion are found out to be 0.17-0.25 cm2 /s and 0.5-0.6 eV for Al diffusion whereas 0.01-0.11 cm2/s and 3.45-3.5 eV for Ga diffusion, respectively in the studied temperature range of 500 oC to 700 oC. The interdiffusivity increases with temperature from 500 oC to 625 oC and decreases for further rise in temperature as the compositional contrast between the two layers decreases significantly at higher temperatures.
作者: A. Pradhan,S. Mukherjee,T. Maitra,A. Nayak,S. Bhunia
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Studying thermal diffusion characteristics and interdiffusion across interfaces in spontaneously grown AlGaAs/AlGaAs superlattice structures to understand their thermal stability and diffusion mechanisms.

The research demonstrates that interdiffusion in spontaneously grown AlGaAs superlattice structures is nonlinear and composition-dependent, with diffusion coefficients varying with time and temperature. Activation enthalpies for Al and Ga diffusion differ significantly (0.5-0.6 eV for Al and 3.45-3.5 eV for Ga), suggesting mechanisms beyond vacancy diffusion. The thermal stability is influenced by compositional contrast, with interdiffusivity peaking at 625°C and decreasing at higher temperatures. Future studies should explore the underlying diffusion mechanisms in more detail.

The study relies on theoretical simulations due to the physical resolution limits of direct experimental tools for ultra-nanoscale structures. The diffusion model assumes specific initial conditions and may not account for all atomic mechanisms, such as the unexplained difference in activation enthalpies for Al and Ga diffusion. The applicability is limited to the specific material system and temperature range studied.

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