1：Experimental Design and Method Selection:

Au loaded In2O3 films were fabricated using RF magnetron sputtering technique at room temperature. Targets were prepared by mixing Au powder with In2O3 powder in different proportions. Films were deposited on quartz substrates in a vacuum chamber with specific base pressure, target-substrate distance, deposition duration, RF power, and argon gas pressure. Annealing was performed on selected films at different temperatures.

2：Sample Selection and Data Sources:

Films with Au loading concentrations of 0, 1, 3, 5, 7, and 10 wt% were prepared. A typical film with 10 wt% Au was annealed at 200, 300, and 400 °C.

3：List of Experimental Equipment and Materials:

Equipment includes X-ray diffractometer (Bruker AXS D8 Advance), micro-Raman spectrometer (Labram HR-800, Horiba Jobin Yvon), atomic force microscope (Bruker-Dimension edge), field emission scanning electron microscope (FEI-Nova Nano SEM 450), electron energy dispersive X-ray spectrometer (EDS-Quantax 200), X-ray photoelectron spectrometer (PHI 5000 VersaProbe II), UV-Visible spectrophotometer (JASCO, V-550), Hall measurement system (ECOPIA-HMS 5000), and spectrophotometer (Fluoromax-4, Horiba Jobin Yvon). Materials include Au powder, In2O3 powder (Sigma Aldrich purity 99.99%), and quartz substrates.

4：99%), and quartz substrates. Experimental Procedures and Operational Workflow:

4. Experimental Procedures and Operational Workflow: Films were deposited using RF magnetron sputtering with specified parameters. Annealing was done in a furnace at set temperatures. Structural analysis was performed using XRD and Raman spectroscopy. Morphological analysis used AFM and FESEM. Compositional analysis used EDX. Chemical state analysis used XPS. Optical properties were measured using UV-Vis spectroscopy. Electrical properties were measured using Hall effect system. Photoluminescence spectra were recorded with excitation at 300 nm.

5：Data Analysis Methods:

XRD data analyzed using Scherrer formula for crystallite size, lattice constant, and strain. Raman spectra identified vibrational modes. AFM and FESEM images analyzed for surface morphology and roughness. EDX for elemental composition. XPS spectra deconvoluted for binding energies. UV-Vis data used Tauc plot for band gap. Hall measurements for electrical parameters. PL spectra analyzed for emission intensities.