研究目的
To fabricate a 2D micromirror with large electromagnetic driving forces for application in LiDAR devices, focusing on embedded coil design to reduce resistance and increase driving force.
研究成果
The embedded coil design successfully provides larger driving forces and reduces inertial moment, enabling a 3 mm micromirror to achieve swing angles of ±23.6° horizontally and ±5.7° vertically under 5 V. The fabrication process, including stress management techniques, is feasible, and the design shows promise for LiDAR applications, with potential for further improvement by increasing coil depth.
研究不足
The fabrication process involves complex steps with potential stress issues due to thermal expansion coefficient mismatches and intrinsic stresses. The embedded coil design may reduce scanning frequency compared to convex designs, and power consumption is higher than electrostatic driving methods. Further optimization is needed for higher frequencies and reduced nonlinearity.
1：Experimental Design and Method Selection:
The study involved designing a micromirror with embedded coils to reduce inertial moment and increase coil thickness. Modal and harmonic response analyses were conducted to evaluate the design. Fabrication processes included deep etching, electroplating, and stress management techniques.
2：Sample Selection and Data Sources:
High-resistant silicon substrate was used, with boron doping via ion implantation. Samples were fabricated using MEMS processes.
3：List of Experimental Equipment and Materials:
Equipment included ICPCVD for oxide deposition, DRIE for silicon etching, electron beam evaporator for metal deposition, electroplating setup, CMP for polishing, and SEM for imaging. Materials included silicon wafers, boron ions, oxide layers, Ti/Cu seed layers, copper for electroplating, and BOE solutions.
4：Experimental Procedures and Operational Workflow:
The process flow involved boron doping, oxide deposition, trench etching via DRIE, seed layer deposition and lift-off, electroplating, CMP, oxide release, metal bridge formation, and final DRIE for structure definition. Stress reduction methods included low-temperature deposition and regionalized metal patterning.
5：Data Analysis Methods:
Performance was verified using a signal generator to apply sinusoidal voltages, with swing angles measured via laser reflection and piezoresistive feedback. Resonance frequencies and responses were analyzed.
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