研究目的
To develop a new test element and method for evaluating optical characteristics such as propagation loss in silicon waveguides, aiming for quick and precise on-wafer testing to support high-volume production of photonic devices.
研究成果
The proposed test element and method enable precise and easy measurement of propagation loss without being affected by manufacturing errors in grating couplers and PDs. It has potential for reducing measurement time in wafer-level inspection and is applicable to monitoring power balances in other photonic devices, supporting high-volume production.
研究不足
The paper does not explicitly mention limitations, but potential areas for optimization could include scalability to other optical characteristics, sensitivity to environmental factors, or integration with other testing methods.
1:Experimental Design and Method Selection:
The method involves designing a test element with two input couplers, an interferometer, waveguides of different lengths, and a photodetector to measure propagation loss without being affected by manufacturing errors in grating couplers and PDs. The interferometer's branching ratio has wavelength dependence, allowing extraction of insertion loss differences.
2:Sample Selection and Data Sources:
Test elements were fabricated with long waveguide lengths of 1, 2, 3, and 5 cm on a silicon wafer, using a Ge PD integrated on the Si waveguide.
3:List of Experimental Equipment and Materials:
The test element includes grating couplers, an interferometer, waveguides, and a germanium photodetector. Specific models or brands are not mentioned.
4:Experimental Procedures and Operational Workflow:
Light is coupled into the test element via grating couplers, propagates through waveguides of different lengths, and is detected by the PD. The photo current is monitored, and wavelength dependence of optical power is measured to derive propagation loss.
5:Data Analysis Methods:
The amplitude of the output power (difference between peak and dip) is used to extract insertion loss for different waveguide lengths, from which propagation loss is calculated (e.g., 3.4 dB/cm).
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