研究目的
To characterize large area Silicon Carbide based UV sensors for spectroscopic applications in gas or liquid monitoring, focusing on performance metrics such as dark current density, responsivity, visible blindness, switching time, and temperature effects.
研究成果
The large area SiC photodetectors exhibit excellent performance with low dark current, high responsivity, visible blindness, and fast switching times, making them suitable for portable spectroscopy systems in environmental and volcanology applications. Temperature stability in the 270-320 nm range is highlighted, with recommendations for future work on interface states.
研究不足
The inhomogeneity in barrier height may affect performance; temperature effects are irregular at low wavelengths due to interface states; further investigation is needed for certain aspects like charge trapping phenomena.
1：Experimental Design and Method Selection:
The study involves fabricating large area SiC Schottky photodetectors and characterizing their electrical and optical properties. Methods include current-voltage measurements, responsivity spectra analysis, and dynamic response testing using standard semiconductor characterization techniques.
2：Sample Selection and Data Sources:
Devices were fabricated on n-type 4H-SiC epitaxial layers with specific dopant concentrations and geometries. Data were collected from on-wafer measurements under controlled conditions.
3：List of Experimental Equipment and Materials:
Equipment includes a temperature-controlled probe station, semiconductor parameter analyzer (Agilent 4155C), Xenon lamp, monochromator (CVI/Digikrom DK240), optical fiber, power meter (Ophir-Optronics), He-Cd laser, acoustic optical modulator (ISOMET 1211-350), digital driver (223 A-1), and oscilloscope (Tektronix DPO 7104C). Materials include Ni films for contacts and SiC substrates.
4：Experimental Procedures and Operational Workflow:
Fabrication involved sputtering Ni films, lithography, etching, and annealing. Electrical characterization measured IV curves in dark and at various temperatures. Optical characterization used monochromatic light to measure responsivity spectra and dynamic response with modulated light sources.
5：Data Analysis Methods:
Data were analyzed using thermo-ionic emission theory for barrier height and ideality factor extraction, and standard methods for responsivity and switching time calculations.
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