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- 实验方案
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A Novel Actuator-Internal Micro/Nano Positioning Stage with an Arch-Shape Bridge Type Amplifier
摘要： This paper presents a novel actuator-internal two degree-of-freedom (2-DOF) micro/nano positioning stage actuated by piezoelectric (PZT) actuators, which can be used as a fine actuation part in dual-stage system. To compensate the positioning error of coarse stage and achieve a large motion stroke, a symmetrical structure with an arch-shape bridge type amplifier based on single notch circular flexure hinges is proposed and utilized in the positioning stage. Due to the compound bridge arm configuration and compact flexure hinge structure, the amplification mechanism can realize high lateral stiffness and compact structure simultaneously, which is of great importance to protect PZT actuators. The amplification mechanism is integrated into the decoupling mechanism to improve compactness, and to produce decoupled motion in X- and Y- axes. An analytical model is established to explore the static and dynamic characteristics, and the geometric parameters are optimized. The performance of the positioning stage is evaluated through finite element analysis (FEA) and experimental test. The results indicate that the stage can implement 2-DOF decoupled motion with a travel range of 55.4×53.2 μm2, and the motion resolution is 8 nm. The stage can be used in probe tip-based micro/nano scratching.
关键词： Decoupling mechanism,Micro/nano positioning,Actuator-internal configuration,Arch-shape bridge type amplifier
更新于2025-09-23 15:23:52
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The Oscillation Dynamics of Droplets Subject to Electrowetting Actuation
摘要： The dynamic behavior of an Electrowetting-on-Dielectrics (EWOD) actuation process can be linked to certain fluid properties of the actuated polar liquid droplet. After actuation, inertia will lead to droplet oscillations where the contact angle asymptotically approaches the newly created surface tension equilibrium value. The decay behavior, frequency and amplitude of these oscillations can be related to material parameters such as density, viscosity and mass. In this work we study the characteristics of these oscillations, present simulation results and develop a measurement setup for first observations of oscillations on deionized water droplets. We show that there is a big difference between two grounding schemes, in particular regarding the dynamic movement of the liquid-gas interface. It turns out that only an electrical grounding from below leads to utilizable oscillations. Finally we point towards applications for future Lab-on-a-Chip applications.
关键词： actuator,FEM simulation,electrowetting,viscosity sensing,droplet oscillations,Lab-on-a-Chip
更新于2025-09-23 15:22:29
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PWM as a Low Cost Method for the Analog Control of MEMS Devices
摘要： In this paper, we discuss the use of pulse width modulation (PWM) to control analog MEMS devices. We achieve a precise linear analog control of MEMS by applying PWM signal with a frequency well above the system’s mechanical natural frequency. We first demonstrate this using a parallel plate actuator and comb-drive, and then extend the technique to control a commercial deformable mirror. Such an approach allows the system designer to replace expensive drive electronics such as the high precision DACs and high voltage, linear amplifiers with a simple on-off switch. The advancements in the electronics industry tend to make precise timing cheaper and faster; our approach exploits these long-term trends to create low-cost control circuits. We also show how PWM control can linearize the positional response of the devices, where typically the position would depend quadratically on the applied analog voltage.
关键词： linearize,pulse width modulation,Microelectromechanical systems,electrostatic actuator
更新于2025-09-23 15:22:29
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[IEEE 2018 25th International Conference on Mechatronics and Machine Vision in Practice (M2VIP) - Stuttgart, Germany (2018.11.20-2018.11.22)] 2018 25th International Conference on Mechatronics and Machine Vision in Practice (M2VIP) - A Soft Ring-shaped Actuator: FE Simulation and Motion Tracking
摘要： A soft ring-shaped actuator is inspired by the human stomach. This actuator can contract inward, mimicking the movements of the human stomach. It can benefit the research field of medical science and food engineering. In this paper, we investigate the deformation of such actuator employing finite-element simulation and motion tracking. Simulations are carried out to examine the influence of different pressure on the performance of the actuator. Motion tracking system is applied to track the mid-points on the deformed surface when the actuator is under pressurisation. The results show that the actuator can achieve axisymmetric contraction when inflated. The principal movements of mid-points are on the horizontal plane, whereas the change in the axial direction is negligible. This investigation can benefit the understanding of the profile of the deformed membrane and the construction of the mathematical modelling.
关键词： finite-element simulation,ring-shaped actuator,deformation,motion tracking,soft robotics
更新于2025-09-23 15:22:29
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Mass measurement of grasped object with tweezers employing bimorph piezoelectric actuators
摘要： This paper deals with tweezers for a mass detection during micromanipulation. It measures 52 mm×30 mm×10 mm and weighs 37 g. Each ?nger consists of a bimorph piezoelectric actuator with a stainless steel tip. One of the tweezers working as a vibrator was oscillated at its resonance frequency, and another working as a grasper opened and closed the gap between the tips of the bimorph piezoelectric actuators. The simulation model that represents the contact of two beams and a lumped mass as springs was described. The resonance frequency was increased when the tweezers grasped an object. The relationship between the mass of the object and frequency was obtained experimentally. Because the charge generated by the piezoelectric effect also affected the resonance frequency, the frequency change in the experiments was smaller than that in the simulation.
关键词： resonance frequency,mass evaluation,cantilever,Piezoelectric actuator,vibration
更新于2025-09-23 15:22:29
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Composite modeling and parameter identification of broad bandwidth hysteretic dynamics in piezoelectric fast steering platform
摘要： Over a broadband range of frequencies, it is difficult to develop precise model of piezoelectric fast steering platforms (FSPs) due to the complex hysteretic and dynamic behaviors. This paper thus presents one approach of composite modeling and parameter identification by employing a composite hysteretic model. The proposed composite model consists of the Bouc-Wen hysteresis, electro-mechanical dynamics, creep dynamics and the high frequency mirror dynamics. Physical meanings can be found in the linear component which is beneficial to controller design and other further developments using the proposed model. A step-by-step approach is proposed to identify the composite hysteretic model. Finally, the FSP experiment is provided to validate the effectiveness of the proposed modeling and parameter identification approaches.
关键词： Electro-optical system,Creep effect,Hysteretic dynamics,Fast steering platform,Electro-mechanical dynamics,Piezoelectric actuator
更新于2025-09-23 15:22:29
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Design of a novel dual-axis micro manipulator with an asymmetric compliant structure
摘要： This paper presents a novel piezoelectrically actuated dual-axis micro manipulator with an asymmetric compliant structure. The mechanical design of the micro manipulator is first presented. A novel guiding bridge (GB)-type mechanism was proposed and utilized in the left part of the micro manipulator to improve the dynamic performance of the micro manipulator. The analytical model has been established based on pseudo-rigid-body (PRB) model and matrix-based compliance modeling (MCM) method. The kinematic and the precision of the micro manipulator have been analyzed, and the input and output couplings have been investigated. The prototype of the micro manipulator has been fabricated by wire electro discharge machining (WEDM). Then, open-loop experimental tests have been performed. The experimental results match well with the analytical calculation, and the amplification ratios are 11.12 and 4.64 for left part and right part, respectively. Proportional-integral (PI) controller has been used to regulate the output displacement and grasping force, and a series of closed-loop experiments have been conducted to investigate the performance of the micro manipulator. The results show that the position resolution for both the right and left parts is 0.15 μm, and the force resolution is 4 mN.
关键词： Mechanical design,Piezoelectric actuator,Micro manipulator,Compliant mechanism
更新于2025-09-23 15:22:29
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[IEEE 2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES) - Gdynia, Poland (2018.6.21-2018.6.23)] 2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES) - Optimization of Class-D Amplifier Output Stage for Piezoelectric Actuator Control
摘要： Design of a piezoelectric driver for a microelectromechanical actuator in a small form factor for laser telecommunications is introduced. The driver introduces a number of challenges due to its size and power limitations as a Microelectromechanical Systems (MEMS) actuator. Because of the small form factor, the driver must be integrated into the actuator itself, which limits its size and power. The efficiency of a linear amplifier becomes a major drawback due to the dissipated heat of only 20 W for the Laser Telecommunications Module (LTM), low efficiency of a linear amplifier becomes a major drawback due to the dissipated heat. Switching Class-E amplifiers provide exceptional efficiency compared to non-switching solutions at a price of high frequency harmonics, which allows for higher output power without additional heat dissipation. The efficiency, however, comes at a price of high frequency harmonics, which must be reduced by implementing a High-Energy-Efficiency Interference (HEEI) and Total Harmonic Distortion (THD). Driving a capacitive load, such as a piezoelectric actuator, at a high frequency with a Class-E amplifier requires a matching network to achieve the desired output power. The measurements were performed on a custom-made driver model for piezoelectric stack actuators with 270 V peak-to-peak voltage, 500 kHz switching frequency and a range of capacitive load from 2.1 nF to 20 nF.
关键词： Actuator,Driver,Amplifier,Distortion,LTM.2,Output Stage,SMPS,Class-E,Total,LTM,THD,MEMS,Harmonic,Transmission,Telecommunications,Laser,Module,High-Energy-Efficiency,HEEI,Interference,Piezoelectric,Microelectromechanical
更新于2025-09-23 15:22:29
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Design of optimised linear quadratic regulator for capsule endoscopes based on artificial bee colony tuning algorithm
摘要： Wireless Capsule Endoscope (WCE) is a new medical device that can be used for examining the whole digestive tract if effectively actuated. In this paper, a new three-coil actuator is proposed for the capsule endoscope navigation system. The proposed system, which is based on the current-controlled magnetic levitation concept, utilises a small permanent magnet within the capsule body and an arrangement of controlled electromagnet actuator placed on a movable frame. The dynamics of the proposed control system is modelled mathematically and then formulated in state space form. In this research, the Linear Quadratic Regulator (LQR) technique is used for designing a 3DOF controller for the capsule actuation system. Artificial Bee Colony (ABC) tuning algorithm is used for obtaining optimum values for controller gain parameters. The optimised LQR controller is simulated by using the Matlab/Simulink tool, and its performance is then evaluated based on the stability and control effort parameters to validate the proposed system. Finally, the simulation results suggest that the LQR controller based on the ABC optimisation method can be adopted to synthesise an effective capsule actuation system.
关键词： electromagnetic actuator,linear quadratic regulator (LQR),wireless capsule endoscope (WCE),artificial bee colony (ABC)
更新于2025-09-23 15:22:29
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Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process
摘要： As part of an effort to develop piezoelectric inkjet print head (PIPH), a process for fabricating its Si-cups and actuator membranes of multi-layered structures was investigated. The manufacture of this device was enabled by the use of deep reactive ion etching (DRIE). Based on that, multi-step DRIE process was proposed to etch the multi-layered actuator membranes on silicon on insulator wafers. Due to the appropriate parameters of the etching process, undesirable effects, such as Si grasses, notching effect of Si-cups and the bowing formation on the sidewalls, were also avoided. The way to eliminate the over-etching of SiO2 membranes by controlling the appropriate platen power and process duration simultaneously was also presented. High quality PIPH actuator membranes were ?nally obtained, making great contributes to the successful inkjet test.
关键词： multi-layered actuator membranes,deep reactive ion etching,piezoelectric inkjet print head,silicon on insulator wafers,over-etching
更新于2025-09-23 15:21:21