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Behavior of Al/Cu/Ti electrodes in surface acoustic wave filter at high power
摘要： Driven by the need for high data-rates and continuous reduction in device size, surface acoustic wave filters are required to work under increasingly high power. In this work, a series of 2.7 GHz surface acoustic wave filters with Al/Cu/Ti three-layered electrode were fabricated and loaded with high power. Those three-layered electrodes showed weaker texture but higher stability than Al-Cu alloy electrode at high power. Morphologies, microstructures and elements distribution in cross section of fingers were analyzed carefully before and after high power loading. Results show that the circular-arc-shaped outline of fingers were appeared in most samples after high power loading, and the number of gains in the finger cross section changed from some into several with much larger volume. The features of distribution of Cu atoms also coincided with these microstructures. By finite element method and phase diagram analysis, the higher stability of Al/Cu/Ti three-layered electrodes are attributed to precipitation of θ-CuAl2 in the bottom edge of electrode finger and Cu-doped α-Al in the center top.
关键词： stress,Al-Cu alloy,high power,surface acoustic wave filter,three-layered electrode
更新于2025-09-23 15:23:52
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Effects of different annealing processes on optoelectronic and bending fatigue properties of AgZr and ITO/AgZr thin film metallic glass
摘要： Transparent conducting oxide (TCO) films are widely used throughout the optoelectronics industry. The present study explores the optoelectronic responses of AgZr (AZ) and ITO/AgZr (IAZ) thin film metallic glasses (TFMGs) with different Ag and Zr compositions and processed by two different annealing methods, namely furnace annealing (FA) and laser annealing (LA). Among the various as-deposited AZ and IAZ films, the ITO/Ag66Zr34 (IA6Z) film has the highest optical transmittance (55.7%) and the lowest sheet resistance (145.8 Ω/□). For the FA samples, an annealing temperature of 300 °C results in the optimal optoelectronic properties, namely a transmittance of 68.4% and a sheet resistance of 47.2 Ω/□. For the LA samples, the optimal processing conditions (a pulse energy of 2.5 μJ and a repetition rate of 150 kHz) yield optical transmittance and sheet resistance values of 64.0% and 17.8 Ω/□ respectively. The optimal LA processing conditions increase the Haacke figure of merit of the IA6Z sample from 2.0 × 10?5 under the as-deposited condition to 6.5 × 10?4 Ω?1 under the annealed condition; corresponding to a 32.5-fold improvement. Finally, the relative change in resistivity (ΔR/R0, where R0 is the initial resistivity, Ri is the measured resistivity after a certain number of cycles, and ΔR is Ri - R0) of the as-deposited IA6Z sample following fatigue testing (10,000 cycles) with a bend radius of 7 mm (ΔR/R0 = 0.49) is significantly lower than that of a pure ITO film of roughly equivalent thickness (ΔR/R0 = 0.93).
关键词： Laser annealing,Bi-layered electrode,Furnace annealing,Thin film metallic glass
更新于2025-09-19 17:15:36