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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Monolithic Integration of Plasmonic Meta-Material Absorber with CMOS-MEMs Infrared Sensor for Responsivity Enhancement and Human Detection Application
摘要： This study integrates monolithically a metal-insulator-metal-based plasmonic metamaterial absorber (PMA) with a thermoelectric (TE) infrared (IR) sensor using standard TSMC CMOS platform. The proposed design extends the strip-via releasing hole structure in [1] to further integrate MIM absorber with TE IR sensor. Such design exhibits three merits: (1) the line width requirement of MIM absorber is achieved by CMOS process, (2) the absorption peaks of MIM absorbers can be modulated by pattern designs in the epsilon-near-pole region, and (3) the MIM absorbers can be designed to broaden the absorption spectrum of IR sensor. In application, the absorption spectrum of IR sensor is designed within 8-14μm in this study for human detection application. Measurement result demonstrates the integration of MIM absorber and IR sensor can achieve 21% improvement and the measured absorption spectrum matches with simulation.
关键词： CMOS-MEMS,human detection,thermoelectric infrared sensor,responsivity enhancement,plasmonic metamaterial absorber
更新于2025-09-23 15:21:01
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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - A Closed-Loop Controlled Cmos Mems Biaxial Scanning Mirror for Projection Display
摘要： This work presents a bi-axial electromagnetically-driven piezoresistively sensed scanning mirror with a θopt?D?fr,fast product over 2400 deg?mm?kHz, showing the capability to achieve HD720 (720 × 1280) display resolution. Both driving and sensing capabilities are conveniently realized by CMOS MEMS technologies. The transduction mechanism provides a more linear response than capacitively transduced scanning mirrors. Based on the open-loop characterization of the driving and sensing performance, closed-loop control of slow-axis motion is designed and demonstrated.
关键词： piezoresistive sensing,closed-loop control,scanning mirror,CMOS MEMS,electromagnetic actuation,projection display
更新于2025-09-12 10:27:22
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Performance enhance of CMOS-MEMS thermoelectric infrared sensor by using sensing material and structure design
摘要： This study presents the micro thermoelectric infrared sensor consisted of the heat material. Experiment results indicate the Detectivity of proposed design is 2-2.6 fold higher The proposed infrared absorber design has an umbrella-like structure with a post anchor to the TSMC 0.18μm 1P6M standard CMOS process and the in-house post-CMOS MEMS process. (infrared sensor consisted of only the serpentine structure with embedded thermocouple), a transduction absorber and the serpentine structure with embedded thermocouple using the serpentine suspension with embedded thermocouple. As compare with the reference design much higher Seebeck coefficient (56-fold), and is employed in this study as the thermocouple junctions is increased. Moreover, the umbrella-like structure has higher infrared absorption area with and without Silicide are respectively characterized. The poly-Si with no Silicide has a as compare with the serpentine structure. In addition, the Seebeck coefficients of poly-Si films better heat-flow path is achieved and the temperature difference between the hot and cold than that of the reference one at 200mtorr. Experiment also show that the responsivity enhancement of proposed design is further increased as the sensor size is reduced in area.
关键词： thermoelectric,Seebeck effect,thermopile,CMOS-MEMS,infrared sensor
更新于2025-09-09 09:28:46