[IEEE 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Kyoto, Japan (2018.7.9-2018.7.13)] 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - The stable and long lifetime planar field emission cathode made of a CNT ink

摘要： We present the planar cathode that is dedicated for the miniaturized transmission electron microscope, which all components are fabricated based on MEMS Si-glass technology processes. The cathode is made of a commercial CNT ink without addition of fillers, and results in the stable and long lifetime field emission of electrons.