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Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film
摘要： In this work, we attempted to enhance the torsional fracture strength of single crystal silicon (SCS) resonators for micro mirrors application by introducing a 300 nm-thick diamond-like carbon (DLC) coating. The SCS torsional beams of the resonators were 20 μm wide and 9 μm thick, and fully coated with DLC films using plasma enhanced chemical vapor deposition (PECVD) at three different deposition bias voltages. The resonators were driven by a piezoelectric actuator and their angular amplitude was measured by a custom-made torsional test system. Average nominal torsional fracture strength of DLC coated resonators was 11.1–30.0% higher than that of bare SCS, reaching a value of 2.93 GPa. The torsional fracture strength of resonators exhibited a good agreement with the tensile fracture strength. Deviations in torsional strength were reduced with increasing deposition bias voltage due to the compressive residual stress of DLC films.
关键词： Single crystal silicon,Micro mirror resonator,Diamond-like carbon film,Strength deviation,Torsional fracture strength
更新于2025-09-23 15:23:52
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Ellipsometry - Principles and Techniques for Materials Characterization || Spectroscopic Ellipsometry - Application on the Classification of Diamond-Like Carbon Films
摘要： Diamond-like carbon (DLC) films have been spreading from their theoretical basis to worldwide industrial applications because of their unique properties. Since their properties depend strongly on the conditions of synthesis, the effective classification of DLC films becomes quite necessary. From the ternary phase diagram to the Japan New Diamond Forum standard, the classification attempts are also accompanied by the continuous development of their applications. Generally, the hydrogen content and sp3/(sp2 + sp3) ratio are the primary parameters for their classification. However, researchers are afraid that currently sp3/(sp2 + sp3) ratio estimated included not only network sp3 but also sp3 hybrid carbons in the hydrogen-terminated cluster. Simultaneously, the above classification methods need to use the large equipment, such as the synchronous radiation source. Therefore, to realize more straightforward to classify DLC films efficiently, the optical constants (refractive index (n) and extinction coefficient (k)) have been proposed in 2013 to be effective method to classify the DLC films, for which a lot of considerable discussion in the past ISO/TC-107 meetings has been made. The purpose of this chapter is to introduce the latest developments of optical constants on the classification of DLC films and explore their relationship with the current standard.
关键词： spectroscopic ellipsometry,diamond-like carbon film,classification
更新于2025-09-23 15:21:01
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Synthesis of Cu2O/Carbon film/NiCoB-GO Heterostructure Photocathode for Efficient Photoelectrochemical Water Splitting
摘要： Photoelectrochemical (PEC) water splitting offers a promising way to convert solar energy to chemical energy. The electron transfer rate and surface-catalyzed ability toward hydrogen evolution reaction (HER) play the key roles in the efficiency of PEC water splitting. In this work, a Cu2O/Carbon film/NiCoB-GO heterostructure photocathode is fabricated. Among them, thickness-controllable carbon film served as the electron transport and protective layer with favourable optical property, NiCoB-GO amorphous catalyst displays the efficient performance towards HER in neutral condition. The optimized photocathode shows the PEC-HER performance with a photocurrent density of -2.9 mA/cm2 at 0 V vs. RHE, and it also presents better stability than bare Cu2O. This work provides a novel heterostructure photocathode for promoting solar-driven PEC water splitting efficiently.
关键词： Femtosecond transient absorption spectroscopy,Photoelectrochemical water splitting,Electron transport path,Carbon film,Amorphous catalyst
更新于2025-09-19 17:15:36
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Hydrogenated amorphous carbon films with different nanostructure: a comparative study
摘要： The introduction of curved graphite fragments into hydrogenated amorphous carbon films has been studied, and their contents are always estimated by TEM and Raman. Here, we detailedly discussed the advantage and disadvantage of TEM and Raman fit method. Combined with FTIR results, we claified the chemical structures of the structural films and the bonded sites of doped H. The curved graphite structures included hexahydric carbon rings, and amorphous carbon (a-C) structures had rich olefinic groups and H. Finally, the differences among TEM, Raman, FTIR and H analysis in terms of the contents of curved graphite fragments were discussed.
关键词： FTIR,nanostructure,Raman,a-C:H,hydrogenated amorphous carbon film
更新于2025-09-10 09:29:36
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Deposition of Amorphous Carbon Thin Films by RF Magnetron Sputtering using Woodceramics as Target
摘要： Woodceramics, a substance based on woody materials carbonized at elevated temperatures after impregnating with phenolic resin, have been developed as a new kind of porous carbonaceous material. To expand the industrial application, we attempted to produce amorphous carbon films were RF magnetron sputtering using woodceramics as its target. As a result, typical amorphous carbon films were successfully produced using woodceramics, and the films were characterized by X-ray diffractometry, Raman spectroscopy and X-ray photoelectron spectroscopy. The films produced were composed of carbon turbostratic structure or amorphous whose electron configurations consisted of sp2 and sp3. The ratio of sp3 bonding in the films were about 53% just after the sputtering, but the number increased to about 82% after etching the material using argon ions. Fundamental mechanical properties such as hardness and friction coefficient were also measured and taken into account.
关键词： magnetron sputtering,Raman spectroscopy,X-ray photoelectron spectroscopy,amorphous carbon film,woodceramics
更新于2025-09-04 15:30:14