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[IEEE 2018 Conference on Emerging Devices and Smart Systems (ICEDSS) - Tiruchengode, India (2018.3.2-2018.3.3)] 2018 Conference on Emerging Devices and Smart Systems (ICEDSS) - Design of 30 degree DMTL Phase Shifter for K band applications
摘要： The Distributed MEMS Transmission Line based phase shifter is designed by using periodic loading of shunt switches in ECPW based transmission line. Because of the reduced size and better RF performance the DMTL phase shifter is designed using CPW transmission but as frequency increases CPW provide more loss because of the discontinuity of dielectric material. This paper deals with the design of Elevated Coplanar Waveguide (ECPW) based DMTL phase shifter with minimum reflection loss of -20dB at 22GHz.
关键词： DMTL,MEMS switch,ECPW
更新于2025-09-09 09:28:46
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[Institution of Engineering and Technology 12th European Conference on Antennas and Propagation (EuCAP 2018) - London, UK (9-13 April 2018)] 12th European Conference on Antennas and Propagation (EuCAP 2018) - W-Band True-Time Delay Phase Shifters Using Paraffin Microactuators
摘要： We report a distributed loaded line phase shifter based on a new class of electro-thermally actuated RF MEMS devices using paraf?n phase-change material (PCM). Paraf?n is a low loss (tan δ = 6.6×10?4) mechanical phase-change material that exhibits a 15% volumetric change through its solid-liquid transition. Due to its unique electrical and mechanical properties, paraf?n PCM variable capacitors exhibit a very low loss which is critical in designing recon?gurable structures. Here, a low-loss paraf?n PCM based true-time delay, continuously-tunable phase shifter is designed and optimized. A ?gure-of merit of 71.8?/dB is achieved while maintaining a return loss more than 12 dB. Designed phase shifter has a maximum insertion loss of 5 dB for a 360? phase shift. Electro-thermo-mechanical performance of the paraf?n PCM device is studied by carrying out a fully coupled multiphysics simulation. Maximum displacement of 0.8 μm is achieved with a 2.6 μm-thick paraf?n ?lm. A new fabrication method for the deposition of the thin paraf?n ?lm is developed and a fabrication process for the device is presented.
关键词： MEMS,phase shifter,phase-change material,DMTL,paraf?n,millimeter wave
更新于2025-09-04 15:30:14