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Advanced Operation of Microcolumn by Introducing Misalign Corrector
摘要： We introduced an advanced operation of a microcolumn to recover electron beam properties caused by electrodes misalign. The misalign corrector consists of a pair of electrodes and each electrode is divided by four even parts. We confirmed that by applying appropriate bias voltage to some parts of the corrector, electron beam trajectory could be adjusted. As a result, it is found that the corrector can be an useful electron unit to obtain fine electron beam properties.
关键词： Electron beam,Microcolumn,Einzel lens,Misalignment,Source lens
更新于2025-09-23 15:23:52
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Developing New Materials for Electron Beam Melting: Experiences and Challenges
摘要： Lack of industrially available materials for additive manufacturing (AM) of metallic materials along with the promises of materials with improved or unique properties provides a strong drive for developing new process/material combinations. As powder bed technologies for metallic materials are relatively new to the market, and to some extent are only maturing, developers of new process/material combinations have certain challenges to overcome. Firstly, basic knowledge on the behavior of materials (even those well established for other applications) under extreme conditions of melting/solidification with beam-based AM methods is far from being adequate. Secondly, manufacturing of the equipment is up to date driven by industrial application, thus optimization of the AM machines for small test batches of powders is still belongs to research and development projects. Also, majority of the powder manufacturers are primarily driven by the market development, and even they are well aware of the demands imposed by the powder bed AM machines, availability of small test batches of adequate powders may be problematic or at least quite costly for the R&D oriented users. Present paper describes the experiences in developing new materials for EBM A2 machine by Arcam EBM, modified for operating with powder batches of 100-200 ml and less. In particular it discusses achievements and challenges of working with powders from different materials with specifications far beyond the range suggested by machine manufacturer. Also it discusses the possibility of using blended rather than pre-alloyed powders for achieving both composite-like and alloyed materials in the same part by steering electron beam energy deposition strategy.
关键词： Electron Beam Melting,material development,composite materials,Additive Manufacturing,blended powders,in situ alloying
更新于2025-09-23 15:23:52
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The Monte Carlo Simulation of Secondary Electrons Excitation in the Resist PMMA
摘要： The Monte Carlo method was used to simulate the process of secondary electrons excitation in resist PMMA with Mott cross section and dielectric function model. By analyzing the characteristics of secondary electrons excitation in the resist PMMA, and the simulation of secondary electrons energy range, we hold the opinion that the secondary electrons can not be ignored in the electron beam lithography.
关键词： Monte Carlo simulation,electron beam lithography (EBL),dielectric function,secondary electrons
更新于2025-09-23 15:23:52
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Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition
摘要： The ability of electrons and atomic hydrogen (AH) to remove residual chlorine from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated. Auger electron spectroscopy (AES) and energy-dispersive X-ray spectroscopy (EDS) measurements as well as thermodynamics calculations support the idea that electrons can remove chlorine from PtCl2 structures via an electron-stimulated desorption (ESD) process. It was found that the effectiveness of electrons to purify deposits greater than a few nanometers in height is compromised by the limited escape depth of the chloride ions generated in the purification step. In contrast, chlorine atoms can be efficiently and completely removed from PtCl2 deposits using AH, regardless of the thickness of the deposit. Although AH was found to be extremely effective at chemically purifying PtCl2 deposits, its viability as a FEBID purification strategy is compromised by the mobility of transient Pt–H species formed during the purification process. Scanning electron microscopy data show that this results in the formation of porous structures and can even cause the deposit to lose structural integrity. However, this phenomenon suggests that the use of AH may be a useful strategy to create high surface area Pt catalysts and may reverse the effects of sintering. In marked contrast to the effect observed with AH, densification of the structure was observed during the postdeposition purification of PtCx deposits created from MeCpPtMe3 using atomic oxygen (AO), although the limited penetration depth of AO restricts its effectiveness as a purification strategy to relatively small nanostructures.
关键词： electron beam processing,focused electron beam induced deposition (FEBID),atomic oxygen,purification,atomic hydrogen
更新于2025-09-23 15:22:29
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Characterization of ECR plasma by means of radial and axial X-ray diagnostics
摘要： This work presents the X-ray characterization of the plasma generated in a simple mirror axis symmetric trap as a function of the magnetic field profile. A Si-Pin detector has been used to characterize warm electron population in axial and radial directions at 6.83 GHz. Moreover, the hot electrons emitted in axial direction has been measured by means of a HyperPure Germanium (HpGe) detector. Results show that X-ray emission is not homogenous, and its homogeneity and temperature depend strongly on the magnetic field profile, and especially on the Bmin/BECR ratio.
关键词： Ion sources (positive ions, negative ions, electron cyclotron resonance (ECR), electron beam (EBIS)),Solid state detectors,X-ray detectors
更新于2025-09-23 15:22:29
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A Slow-Wave Structure Optimization with Variable Helix Section Length in STWT Based on CI-NMCSO Algorithm
摘要： A novel slow-wave structure optimization method on Chaos-improved Normal mutation cat swarm optimization (CI-NMCSO) algorithm is proposed. Under the variable helix section length in STWT, the CI-NMCSO combined with 1D CHRISTINE code is used to calculate the best set of pitch distribution and section length with the objective function of electron beam efficiency improvement. Quantum particle swarm optimization (QPSO) and Cauchy mutated cat swarm optimization (CMCSO) algorithms are applied to make performance comparison. Experimental results show that the beam efficiency has been increased by CI-NMCSO from rated value 30% to 45.3%, and the values using CMCSO and QPSO are 41.8% and 36.5%, respectively, the convergence speed of CI-NMCSO is the fastest, only 16 iterations, while CMCSO and QPSO take 19 and 23 iterations, so the performance of CI-NMCSO is better than CMCSO and QPSO on both optimization precision and calculation speed in terms of slow-wave structure optimization, and is also superior to that with equal section length when the helix section length is variable.
关键词： space traveling-wave tube,electron beam efficiency,chaotic transformation,Slow-wave structure,normal mutation cat swarm optimization
更新于2025-09-23 15:22:29
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Key-Hole Type Quadrupole Lens Test for Advanced Operation of a Microcolumn
摘要： An electron lens is an important part of a microcolumn for focusing electron beam on a sample plane. In this study, we introduced a new type electron lens with a key-hole type quadrupole electrode to improve the microcolumn for advanced operation. And, we analyzed electron beam characteristics of the electron lens using a 3-D simulation analysis.
关键词： Electron beam size,Quadrupole lens,Einzel lens,Microcolumn
更新于2025-09-23 15:22:29
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[IEEE 2018 IEEE 2nd International Conference on Dielectrics (ICD) - Budapest (2018.7.1-2018.7.5)] 2018 IEEE 2nd International Conference on Dielectrics (ICD) - Modelling Charge Generation and Transport in Low Density Polyethylene Irradiated by an Electron-Beam
摘要： One way to bypass charge generation due to injection in an insulator sandwiched between parallel electrodes and submitted to an applied voltage is to implant charges in the material with the help of an electron beam. The electrons position and quantity is theoretically known as long as the beam energy and beam current are known. Low density polyethylene (LDPE) has been characterized with in-situ space charge measurements by pulsed electroacoustic method during irradiation, and with ex-situ measurements while a DC voltage is applied. A fluid charge transport model has been developed using a commercial software, to reproduce the space charge behaviour during and after irradiation. Simulated results during irradiation are first compared to in-situ space charge measurements, in order to validate the model parameters related to e-beam irradiation. Simulations are then performed on post-irradiated samples, polarized under different electric fields. Space charge measurements and current measurements are available for comparison. Simulated results are in relatively good agreement with experimental ones as long as the model parameters are adapted to irradiated low density polyethylene, compared to a best set of parameters adapted uniquely for non-irradiated polyethylene.
关键词： charge generation and transport,fluid model,LDPE,ageing,electron-beam irradiation
更新于2025-09-23 15:22:29
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Impact of sulphurization environment on formation of $$\hbox {Cu}_{2}\hbox {ZnSnS}_{4}$$ Cu 2 ZnSnS 4 films using electron beam evaporated stacked metallic precursors
摘要： The superiority of copper zinc tin sulphide (Cu2ZnSnS4; CZTS) over the existing absorber layer materials is inevitable owing to its cheap, non-toxic and earth abundant constituents with high absorption coefficient value. In the present study, CZTS films are prepared by sulphurizing electron beam deposited precursors of glass/Cu/Zn/Sn/Cu and glass/Cu/Sn/Zn/Cu stacking sequences in two different environments i.e., elemental S powder and 5% H2S + N2 gas at different ramping rates. The effect of sulphurization environment and sulphurization ramping rate on the formation of CZTS is investigated using X-ray diffraction and Raman spectroscopy. The morphology and composition of the films are analysed respectively using field emission gun scanning electron microscopy and energy dispersive X-ray spectroscopy. It is observed that films prepared in elemental S powder at a low ramping rate exhibit better crystallinity with less impurity phases. The presence of ZnS is observed in all the films, while the presence of SnS is observed in films prepared with H2S gas alone, thus concluding that sulphurization in the presence of elemental S powder at a low ramping rate is highly favourable for CZTS film formation. CZTS films with minor ZnS impurity with a bandgap of 1.48 eV is successfully fabricated by using a glass/Cu/Zn/Sn/Cu precursor stack.
关键词： ramping rate,Electron beam evaporation,CZTS
更新于2025-09-23 15:22:29
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The effects of thermal annealing on the structural and electrical properties of Zinc Tin oxide thin films for transparent conducting electrode applications
摘要： The as-deposited and annealed Zinc tin oxide (Zn2SnO4) thin films were deposited by electron beam evaporation technique and were characterized for the structural, optical and electrical properties. The x-ray diffraction technique revealed the amorphous nature of as-deposited thin film while the films annealed at 400, 500 and 6000C in air were found to be polycrystalline. The phase change from amorphous to crystalline Zn2SnO4 results in the higher resistance as revealed by resistance versus temperature measurements. From the Hall Effect, the as deposited film shows the electron mobility and carrier concentrations (electron) equal to 33cm2/V.s and 8.361x 1017cm-3 respectively. The agglomeration of grains in annealed thin films are observed by Atomic Force Microscopy (AFM) technique.The peaks in Optical transmission spectra, observed by using the UV-Vis spectroscopy confirm the creation of sub levels between conduction band minimum and valence band maximum after annealing. The band gaps calculated by Tauc plot explore the possibility of shifting the Fermi level towards valence band maximum after thermal annealing.
关键词： Annealing temperature,Zn2SnO4,Band gap,Oxygen vacancies,Electron beam evaporation,TCOs
更新于2025-09-23 15:22:29