High-density cascade arc plasma sources for application to plasma windows for virtual vacuum interfaces

摘要： We develop two cascade arc plasma sources for application to plasma windows for virtual vacuum interfaces. For windowless vacuum–atmosphere separation, a compact arc discharge source having a channel diameter of 3 mm is fabricated, and an atmospheric Ar thermal plasma is generated. For an alternative differential pumping system, separating low- and high-pressure vacuum chambers, a larger arc device with an 8-mm diameter is also constructed, producing a high-density He plasma. The performances of the two cascade arcs as plasma windows are investigated. The 3-mm arc discharge generates a steep pressure gradient of Ar 100 kPa–100 Pa through the discharge channel, while the 8-mm discharge apparatus isolates the high-pressure side at 7 kPa from the lower pressure of 54 Pa. Emission spectroscopy of visible and vacuum UV radiation reveals the characteristics of the Ar and He plasmas. Spectral analysis yields a plasma temperature of around 1 eV in both discharges. Stark broadenings of the H-b and Ar I lines give an electron density of 6.5 (cid:2) 1016 cm(cid:3)3 for Ar 60 A with a gas ?ow rate of 1.0 l/min and 4.7 (cid:2) 1013 cm(cid:3)3 under a He 100-A and 0.45-l/min condition.